Skip to main content
Record
Title
Inductively-Coupled Plasma Etching for Nanoimprint Si-masters
Type
Student Paper
Publ. year
2019
Author/s
Boström, Oskar
Department/s
Solid State Physics; Department of Physics
In LUP since
2019-02-18
Downloads

Total This Year This Month
822 74 7
Downloads per country

Sweden 181 (22%)
United States of America 144 (18%)
Taiwan (China) 66 (8%)
South Korea 60 (7%)
China 58 (7%)
Germany 41 (5%)
Japan 27 (3%)
France 19 (2%)
Finland 17 (2%)
Russian Federation 16 (2%)
Hong Kong (China) 16 (2%)
India 15 (2%)
Netherlands (Kingdom of the) 15 (2%)
Singapore 14 (2%)
United Kingdom of Great Britain and Northern Ireland 11 (1%)
Portugal 11 (1%)
Switzerland 11 (1%)
Israel 9 (1%)
Denmark 9 (1%)
Italy 9 (1%)
Iran 8 (1%)
Canada 7 (1%)
Australia 6 (1%)
Unknown 6 (1%)
Czechia 5 (1%)
Spain 5 (1%)
Turkiye 4 (0%)
Poland 4 (0%)
Thailand 3 (0%)
Norway 3 (0%)
Belgium 3 (0%)
Indonesia 3 (0%)
Viet Nam 3 (0%)
Philippines 2 (0%)
Austria 2 (0%)
Nigeria 1 (0%)
Mexico 1 (0%)
Kenya 1 (0%)
Ireland 1 (0%)
Malaysia 1 (0%)
New Zealand 1 (0%)
Slovenia 1 (0%)
Peru 1 (0%)
About
The download statistics shown here have been collected since the launch of LUP in October 2007 and are updated every night. Statistics are available for all records with open access fulltexts. Efforts have been made to exclude downloads by robots and track irregular download activities.

About accessibility

Disclaimer
The information on downloads per country is based on the geolocation of IP addresses and may not be completely accurate. The statistics presented here may also change retroactively when the calculation process is improved to provide more accurate results.

Statistics Last Updated
Fri Sep 26 08:48:26 2025