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Record
Title
Damage Analysis of Reactive Ion and Atomic Layer Etched Silicon
Type
Student Paper
Publ. year
2023
Author/s
Al Abrash, Mohammad
Department/s
Solid State Physics; Department of Physics
In LUP since
2023-06-13
Downloads

Total This Year This Month
671 344 15
Downloads per country

United States of America 240 (37%)
South Korea 85 (13%)
Germany 58 (9%)
Sweden 52 (8%)
China 22 (3%)
Japan 21 (3%)
Taiwan (China) 16 (2%)
Singapore 15 (2%)
Netherlands (Kingdom of the) 13 (2%)
Russian Federation 13 (2%)
Hong Kong (China) 11 (2%)
India 11 (2%)
Switzerland 11 (2%)
United Kingdom of Great Britain and Northern Ireland 9 (1%)
France 8 (1%)
Australia 7 (1%)
Unknown 6 (1%)
Italy 6 (1%)
Denmark 6 (1%)
Algeria 5 (1%)
Canada 5 (1%)
Czechia 4 (1%)
Ireland 3 (0%)
Romania 2 (0%)
Viet Nam 2 (0%)
Norway 2 (0%)
Belgium 2 (0%)
Spain 2 (0%)
Greece 2 (0%)
Latvia 1 (0%)
Bangladesh 1 (0%)
Indonesia 1 (0%)
Mexico 1 (0%)
Pakistan 1 (0%)
Philippines 1 (0%)
Lebanon 1 (0%)
Brazil 1 (0%)
Portugal 1 (0%)
Saudi Arabia 1 (0%)
Finland 1 (0%)
About
The download statistics shown here have been collected since the launch of LUP in October 2007 and are updated every night. Statistics are available for all records with open access fulltexts. Efforts have been made to exclude downloads by robots and track irregular download activities.

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Disclaimer
The information on downloads per country is based on the geolocation of IP addresses and may not be completely accurate. The statistics presented here may also change retroactively when the calculation process is improved to provide more accurate results.

Statistics Last Updated
Wed Dec 24 08:25:38 2025