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Record
Title
Optimizing FinFET Geometry using a Chemical Mechanical Polishing Process
Type
Student Paper
Publ. year
2025
Author/s
Böhm, Paul
Department/s
Department of Electrical and Information Technology
In LUP since
2025-06-16
Downloads

Total This Year This Month
32 32 18
Downloads per country
Sweden 7 (100%)
About
The download statistics shown here have been collected since the launch of LUP in October 2007 and are updated every night. Statistics are available for all records with open access fulltexts. Efforts have been made to exclude downloads by robots and track irregular download activities.

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The information on downloads per country is based on the geolocation of IP addresses and may not be completely accurate. The statistics presented here may also change retroactively when the calculation process is improved to provide more accurate results.

Statistics Last Updated
Sat Jul 26 08:41:13 2025