The fabrication of dense and uniform InAs nanowire arrays
Persson, A. I. ; Fröberg, Linus LU ; Samuelson, Lars LU and Linke, Heiner LU
(2009)
In Nanotechnology
20(22).
- Abstract
- Nanowires are important candidates for use in future electronics, photonics and thermoelectrics applications. We focus here in particular on nanowires for use in thermoelectric power generation and present a method of fabricating dense uniform InAs nanowire arrays amenable to future incorporation of advanced heterostructures that could further increase the thermoelectric performance of these nanowires. In these applications it will be important to have the nanowires densely packed in order to give an appreciable amount of power output. Here we present the fabrication of such dense arrays, using metal-particle seeded growth and chemical beam epitaxy, where the metal particles are defined by electron beam lithography, metal evaporation and... (More)
- Nanowires are important candidates for use in future electronics, photonics and thermoelectrics applications. We focus here in particular on nanowires for use in thermoelectric power generation and present a method of fabricating dense uniform InAs nanowire arrays amenable to future incorporation of advanced heterostructures that could further increase the thermoelectric performance of these nanowires. In these applications it will be important to have the nanowires densely packed in order to give an appreciable amount of power output. Here we present the fabrication of such dense arrays, using metal-particle seeded growth and chemical beam epitaxy, where the metal particles are defined by electron beam lithography, metal evaporation and lift-off. We evaluate the potential of chemical beam epitaxy for the growth of dense, freestanding InAs nanowire arrays and describe the process that enabled us to achieve areal packing densities of up to 19% with a variation of only a few per cent in nanowire diameter and height. We close by discussing how even higher areal packing densities can be achieved. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/1425881
- author
- Persson, A. I.
; Fröberg, Linus
LU
; Samuelson, Lars
LU
and Linke, Heiner
LU
- organization
- publishing date
- 2009
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Nanotechnology
- volume
- 20
- issue
- 22
- article number
- 225304
- publisher
- IOP Publishing
- external identifiers
-
- wos:000266045200014
- scopus:67649191550
- pmid:19433868
- ISSN
- 0957-4484
- DOI
- 10.1088/0957-4484/20/22/225304
- language
- English
- LU publication?
- yes
- id
- aa68f17f-c4d5-428e-8fa5-fe4cfc361411 (old id 1425881)
- date added to LUP
- 2016-04-01 12:35:52
- date last changed
- 2022-03-21 06:32:39
@article{aa68f17f-c4d5-428e-8fa5-fe4cfc361411,
abstract = {{Nanowires are important candidates for use in future electronics, photonics and thermoelectrics applications. We focus here in particular on nanowires for use in thermoelectric power generation and present a method of fabricating dense uniform InAs nanowire arrays amenable to future incorporation of advanced heterostructures that could further increase the thermoelectric performance of these nanowires. In these applications it will be important to have the nanowires densely packed in order to give an appreciable amount of power output. Here we present the fabrication of such dense arrays, using metal-particle seeded growth and chemical beam epitaxy, where the metal particles are defined by electron beam lithography, metal evaporation and lift-off. We evaluate the potential of chemical beam epitaxy for the growth of dense, freestanding InAs nanowire arrays and describe the process that enabled us to achieve areal packing densities of up to 19% with a variation of only a few per cent in nanowire diameter and height. We close by discussing how even higher areal packing densities can be achieved.}},
author = {{Persson, A. I. and Fröberg, Linus and Samuelson, Lars and Linke, Heiner}},
issn = {{0957-4484}},
language = {{eng}},
number = {{22}},
publisher = {{IOP Publishing}},
series = {{Nanotechnology}},
title = {{The fabrication of dense and uniform InAs nanowire arrays}},
url = {{http://dx.doi.org/10.1088/0957-4484/20/22/225304}},
doi = {{10.1088/0957-4484/20/22/225304}},
volume = {{20}},
year = {{2009}},
}