Highly sensitive polymer-based cantilever-sensors for DNA detection
(2005) In Ultramicroscopy 105(1/4). p.215-222- Abstract
- We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent... (More)
- We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3157990
- author
- Calleja, Montserrat ; Nordström, Maria LU ; Alvarez, M. and Tamayo, J.
- publishing date
- 2005
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Ultramicroscopy
- volume
- 105
- issue
- 1/4
- pages
- 215 - 222
- publisher
- Elsevier
- external identifiers
-
- pmid:16051438
- ISSN
- 0304-3991
- DOI
- 10.1016/j.ultramic.2005.06.039
- language
- English
- LU publication?
- no
- id
- deb25fcf-c66c-4313-962c-69059dc9947b (old id 3157990)
- date added to LUP
- 2016-04-04 09:19:07
- date last changed
- 2022-01-29 17:16:59
@article{deb25fcf-c66c-4313-962c-69059dc9947b,
abstract = {{We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.}},
author = {{Calleja, Montserrat and Nordström, Maria and Alvarez, M. and Tamayo, J.}},
issn = {{0304-3991}},
language = {{eng}},
number = {{1/4}},
pages = {{215--222}},
publisher = {{Elsevier}},
series = {{Ultramicroscopy}},
title = {{Highly sensitive polymer-based cantilever-sensors for DNA detection}},
url = {{http://dx.doi.org/10.1016/j.ultramic.2005.06.039}},
doi = {{10.1016/j.ultramic.2005.06.039}},
volume = {{105}},
year = {{2005}},
}