Dry release of all-polymer structures
(2004) 30th International conference on Micro and Nano Engineering (MNE 2004) p.88-89
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3351345
- author
- Haefliger, D. ; Tenje, Maria LU ; Rasmussen, P. and Boisen, A.
- publishing date
- 2004
- type
- Contribution to conference
- publication status
- published
- subject
- pages
- 88 - 89
- conference name
- 30th International conference on Micro and Nano Engineering (MNE 2004)
- conference location
- Netherlands
- conference dates
- 2004-09-19 - 2004-09-22
- language
- English
- LU publication?
- no
- id
- b42b6a79-1649-4957-a8ba-4cba63629ffa (old id 3351345)
- date added to LUP
- 2016-04-04 13:39:26
- date last changed
- 2018-11-21 21:15:24
@misc{b42b6a79-1649-4957-a8ba-4cba63629ffa,
author = {{Haefliger, D. and Tenje, Maria and Rasmussen, P. and Boisen, A.}},
language = {{eng}},
pages = {{88--89}},
title = {{Dry release of all-polymer structures}},
year = {{2004}},
}