Threshold stoichiometry for beam induced nitrogen depletion of SiN
(2002) In Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms 190. p.428-432- Abstract
- Measurements of the stoichiometry of silicon nitride films as a function of the number of incident ions using heavy ion elastic recoil detection (ERD) show that beam-induced nitrogen depletion depends on the projectile species. the beam energy, and the initial stoichiometry. A threshold stoichiometry exists in the range 1.3 > N/Si greater than or equal to 1, below which the films are stable against nitrogen depletion. Above this threshold, depletion is essentially linear with incident fluence. The depletion rate correlates non-linearly with the electronic energy loss of the projectile ion in the film. Sufficiently long exposure of nitrogen-rich films renders the mechanism, which prevents depletion of nitrogen-poor films, ineffective.... (More)
- Measurements of the stoichiometry of silicon nitride films as a function of the number of incident ions using heavy ion elastic recoil detection (ERD) show that beam-induced nitrogen depletion depends on the projectile species. the beam energy, and the initial stoichiometry. A threshold stoichiometry exists in the range 1.3 > N/Si greater than or equal to 1, below which the films are stable against nitrogen depletion. Above this threshold, depletion is essentially linear with incident fluence. The depletion rate correlates non-linearly with the electronic energy loss of the projectile ion in the film. Sufficiently long exposure of nitrogen-rich films renders the mechanism, which prevents depletion of nitrogen-poor films, ineffective. Compromising depth-resolution. nitrogen depletion from SiN films during ERD analysis can be reduced significantly by using projectile beams with low atomic numbers. (C) 2002 Published by Elsevier Science B.V. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/335450
- author
- Timmers, H ; Weijers, TDM ; Elliman, RG ; Uribasterra, J ; Whitlow, Harry J LU and Sarwe, Eva-Lena LU
- organization
- publishing date
- 2002
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- nitrogen depletion, ion beam analysis, elastic recoil detection
- in
- Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
- volume
- 190
- pages
- 428 - 432
- publisher
- Elsevier
- external identifiers
-
- wos:000176108800085
- scopus:0036569663
- ISSN
- 0168-583X
- DOI
- 10.1016/S0168-583X(01)01217-4
- language
- English
- LU publication?
- yes
- additional info
- The information about affiliations in this record was updated in December 2015. The record was previously connected to the following departments: Solid State Physics (011013006), Nuclear Physics (Faculty of Technology) (011013007)
- id
- b577d25d-63a6-4265-a8e9-74266913d1a9 (old id 335450)
- date added to LUP
- 2016-04-01 15:34:26
- date last changed
- 2022-01-28 06:00:03
@article{b577d25d-63a6-4265-a8e9-74266913d1a9,
abstract = {{Measurements of the stoichiometry of silicon nitride films as a function of the number of incident ions using heavy ion elastic recoil detection (ERD) show that beam-induced nitrogen depletion depends on the projectile species. the beam energy, and the initial stoichiometry. A threshold stoichiometry exists in the range 1.3 > N/Si greater than or equal to 1, below which the films are stable against nitrogen depletion. Above this threshold, depletion is essentially linear with incident fluence. The depletion rate correlates non-linearly with the electronic energy loss of the projectile ion in the film. Sufficiently long exposure of nitrogen-rich films renders the mechanism, which prevents depletion of nitrogen-poor films, ineffective. Compromising depth-resolution. nitrogen depletion from SiN films during ERD analysis can be reduced significantly by using projectile beams with low atomic numbers. (C) 2002 Published by Elsevier Science B.V.}},
author = {{Timmers, H and Weijers, TDM and Elliman, RG and Uribasterra, J and Whitlow, Harry J and Sarwe, Eva-Lena}},
issn = {{0168-583X}},
keywords = {{nitrogen depletion; ion beam analysis; elastic recoil detection}},
language = {{eng}},
pages = {{428--432}},
publisher = {{Elsevier}},
series = {{Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms}},
title = {{Threshold stoichiometry for beam induced nitrogen depletion of SiN}},
url = {{http://dx.doi.org/10.1016/S0168-583X(01)01217-4}},
doi = {{10.1016/S0168-583X(01)01217-4}},
volume = {{190}},
year = {{2002}},
}