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Nanoxerography: nanostructured deposition of aerosol particles by charge printing

Krinke, T.J. ; Deppert, Knut LU orcid ; Magnusson, Martin LU ; Fissan, H. and Samuelson, Lars LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
Abstract
A method has been developed to transfer complex charge patterns to flat substrate surfaces, allowing nanostructured deposition of nanoparticles from the gas phase. Comparable to soft lithography, a stamp made of poly(dimethysiloxane) (PDMS), covered with a metal layer, is pressed on the surface of a silicon oxide on silicon substrate. Due to contact charging negative or positive charges are transferred from the stamp to the substrate. The process allows to create patterns with feature sizes from the millimeter range down to the sub-100 nm range during one charging procedure. After the charging process, oppositely charged monodisperse aerosol nanoparticles are deposited on the charge patterns
Please use this url to cite or link to this publication:
author
; ; ; and
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
metal layer, positive charges, charging procedure, nanostructured deposition, nanoxerography, aerosol particles, charge printing, complex charge patterns, flat substrate surfaces, gas phase deposition, soft lithography, poly(dimethysiloxane)
host publication
7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
pages
2 pages
publisher
Lund University
conference name
Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
conference location
Malmö, Sweden
conference dates
2002-06-24 - 2002-06-28
language
English
LU publication?
yes
id
525d56dc-7297-4cdd-a394-cfcacb516f14 (old id 611030)
date added to LUP
2016-04-04 10:35:13
date last changed
2019-03-08 03:30:26
@inproceedings{525d56dc-7297-4cdd-a394-cfcacb516f14,
  abstract     = {{A method has been developed to transfer complex charge patterns to flat substrate surfaces, allowing nanostructured deposition of nanoparticles from the gas phase. Comparable to soft lithography, a stamp made of poly(dimethysiloxane) (PDMS), covered with a metal layer, is pressed on the surface of a silicon oxide on silicon substrate. Due to contact charging negative or positive charges are transferred from the stamp to the substrate. The process allows to create patterns with feature sizes from the millimeter range down to the sub-100 nm range during one charging procedure. After the charging process, oppositely charged monodisperse aerosol nanoparticles are deposited on the charge patterns}},
  author       = {{Krinke, T.J. and Deppert, Knut and Magnusson, Martin and Fissan, H. and Samuelson, Lars}},
  booktitle    = {{7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science}},
  keywords     = {{metal layer; positive charges; charging procedure; nanostructured deposition; nanoxerography; aerosol particles; charge printing; complex charge patterns; flat substrate surfaces; gas phase deposition; soft lithography; poly(dimethysiloxane)}},
  language     = {{eng}},
  publisher    = {{Lund University}},
  title        = {{Nanoxerography: nanostructured deposition of aerosol particles by charge printing}},
  year         = {{2002}},
}