Fabrication and characterisation of AFM probes in SU-8 using a dry release method
(2006) 1st International workshop on nanomechanical sensors p.50-51
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3288072
- author
- Sidler, K. ; Tenje, Maria LU and Boisen, A.
- publishing date
- 2006
- type
- Contribution to conference
- publication status
- published
- subject
- pages
- 50 - 51
- conference name
- 1st International workshop on nanomechanical sensors
- conference location
- Copenhagen, Denmark
- conference dates
- 2006-05-08 - 2006-05-12
- language
- English
- LU publication?
- no
- id
- a7b049ca-be1f-4615-8579-4ed4bf0bea0e (old id 3288072)
- date added to LUP
- 2016-04-04 13:36:24
- date last changed
- 2018-11-21 21:15:04
@misc{a7b049ca-be1f-4615-8579-4ed4bf0bea0e,
author = {{Sidler, K. and Tenje, Maria and Boisen, A.}},
language = {{eng}},
pages = {{50--51}},
title = {{Fabrication and characterisation of AFM probes in SU-8 using a dry release method}},
year = {{2006}},
}