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Fabrication and characterisation of AFM probes in SU-8 using a dry release method

Sidler, K.; Tenje, Maria LU and Boisen, A. (2006) 1st International workshop on nanomechanical sensors p.50-51
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author
publishing date
type
Contribution to conference
publication status
published
subject
pages
50 - 51
conference name
1st International workshop on nanomechanical sensors
language
English
LU publication?
no
id
a7b049ca-be1f-4615-8579-4ed4bf0bea0e (old id 3288072)
date added to LUP
2012-12-19 12:19:38
date last changed
2016-06-29 08:56:48
@misc{a7b049ca-be1f-4615-8579-4ed4bf0bea0e,
  author       = {Sidler, K. and Tenje, Maria and Boisen, A.},
  language     = {eng},
  pages        = {50--51},
  title        = {Fabrication and characterisation of AFM probes in SU-8 using a dry release method},
  year         = {2006},
}