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Dry release of all-polymer structures

Haefliger, D.; Tenje, Maria LU ; Rasmussen, P. and Boisen, A. (2004) 30th International conference on Micro and Nano Engineering (MNE 2004) p.88-89
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author
publishing date
type
Contribution to conference
publication status
published
subject
pages
88 - 89
conference name
30th International conference on Micro and Nano Engineering (MNE 2004)
language
English
LU publication?
no
id
b42b6a79-1649-4957-a8ba-4cba63629ffa (old id 3351345)
date added to LUP
2013-01-09 14:41:24
date last changed
2016-07-06 13:52:08
@misc{b42b6a79-1649-4957-a8ba-4cba63629ffa,
  author       = {Haefliger, D. and Tenje, Maria and Rasmussen, P. and Boisen, A.},
  language     = {eng},
  pages        = {88--89},
  title        = {Dry release of all-polymer structures},
  year         = {2004},
}