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High rate magnetron sputter deposition of thin Al oxide and Mo oxide films

Olsson, Maryam LU (1997)
Abstract
Abstract to be added
Please use this url to cite or link to this publication:
author
supervisor
publishing date
type
Thesis
publication status
published
subject
pages
91 pages
publisher
Uppsala universitet
language
English
LU publication?
no
id
da8f29b4-db8c-44c9-a3de-9704bb6144e2 (old id 4645411)
date added to LUP
2016-04-04 10:50:07
date last changed
2020-05-28 10:24:14
@misc{da8f29b4-db8c-44c9-a3de-9704bb6144e2,
  abstract     = {{Abstract to be added}},
  author       = {{Olsson, Maryam}},
  language     = {{eng}},
  note         = {{Licentiate Thesis}},
  publisher    = {{Uppsala universitet}},
  title        = {{High rate magnetron sputter deposition of thin Al oxide and Mo oxide films}},
  year         = {{1997}},
}