Advanced

High rate magnetron sputter deposition of thin Al oxide and Mo oxide films

Olsson, Maryam LU (1997)
Abstract
Abstract to be added
Please use this url to cite or link to this publication:
author
publishing date
type
Thesis
publication status
published
subject
pages
91 pages
publisher
Uppsala universitet
language
English
LU publication?
no
id
da8f29b4-db8c-44c9-a3de-9704bb6144e2 (old id 4645411)
date added to LUP
2014-09-10 13:10:15
date last changed
2016-09-19 08:45:07
@misc{da8f29b4-db8c-44c9-a3de-9704bb6144e2,
  abstract     = {Abstract to be added},
  author       = {Olsson, Maryam},
  language     = {eng},
  pages        = {91},
  publisher    = {ARRAY(0x81d3378)},
  title        = {High rate magnetron sputter deposition of thin Al oxide and Mo oxide films},
  year         = {1997},
}