Diffusion barrier layer and method for manufacturing a diffusion barrier layer using PECVD technology
(2005) WO2005/081333A2
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/4645895
- inventor
- Olsson, Maryam LU ; Tran Quoc, H. and Gallissian, Alice
- publishing date
- 2005
- type
- Patent
- publication status
- published
- subject
- patent number
- WO2005/081333A2
- language
- English
- LU publication?
- no
- additional info
- Year of approval: 2005
- id
- c700bf17-ef3c-4be2-b887-382cb22b0164 (old id 4645895)
- date added to LUP
- 2016-04-04 13:12:05
- date last changed
- 2018-11-21 21:12:39
@misc{c700bf17-ef3c-4be2-b887-382cb22b0164,
author = {{Olsson, Maryam and Tran Quoc, H. and Gallissian, Alice}},
language = {{eng}},
note = {{Patent, Patent Number: WO2005/081333A2}},
title = {{Diffusion barrier layer and method for manufacturing a diffusion barrier layer using PECVD technology}},
year = {{2005}},
}