Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
(2004) Micro Nano Engin, 2003
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/962293
- author
- Forsén, E ; Carlberg, Patrick LU ; Montelius, Lars LU and Boisen, A
- organization
- publishing date
- 2004
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- host publication
- Microelectr Engin 73-74, 491-495 (2004)
- conference name
- Micro Nano Engin, 2003
- conference location
- Cambridge, United Kingdom
- conference dates
- 0001-01-02
- external identifiers
-
- scopus:2542493502
- language
- English
- LU publication?
- yes
- id
- 0443a53d-cc12-44e6-b8e1-cc511977812c (old id 962293)
- date added to LUP
- 2016-04-04 14:18:12
- date last changed
- 2022-01-30 01:44:59
@inproceedings{0443a53d-cc12-44e6-b8e1-cc511977812c,
author = {{Forsén, E and Carlberg, Patrick and Montelius, Lars and Boisen, A}},
booktitle = {{Microelectr Engin 73-74, 491-495 (2004)}},
language = {{eng}},
title = {{Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping}},
year = {{2004}},
}