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Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

Forsén, E ; Nilsson, S G ; Carlberg, Patrick LU ; Abadal, G ; Pérez-Murano, F ; Esteve, J ; Montserrat, J ; Figueras, E ; Campabadal, F and Verd, J , et al. (2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)
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publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
host publication
Nanotechnol 15, S628-S633 (2004)
conference name
Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)
conference dates
0001-01-02
language
English
LU publication?
yes
id
af86d2f5-1761-432f-893d-58a4f5356797 (old id 962336)
date added to LUP
2016-04-04 13:07:45
date last changed
2018-11-21 21:12:20
@inproceedings{af86d2f5-1761-432f-893d-58a4f5356797,
  author       = {{Forsén, E and Nilsson, S G and Carlberg, Patrick and Abadal, G and Pérez-Murano, F and Esteve, J and Montserrat, J and Figueras, E and Campabadal, F and Verd, J and Montelius, Lars and Barniol, N and Boisen, A}},
  booktitle    = {{Nanotechnol 15, S628-S633 (2004)}},
  language     = {{eng}},
  title        = {{Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist}},
  year         = {{2004}},
}