LUP Statistics
Record
- Title
- Dynamic parameter estimation of atomic layer deposition kinetics applied to in situ quartz crystal microbalance diagnostics
- Type
- Journal Article
- Publ. year
- 2014
- Author/s
- Holmqvist, Anders; Törndahl, Tobias; Magnusson, Fredrik; Zimmermann, Uwe et al.
- Department/s
- Division of Chemical Engineering; Department of Automatic Control; ELLIIT: the Linköping-Lund initiative on IT and mobile communication
- In LUP since
- 2016-04-01
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