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- 2023
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Mark
High Aspect Ratio Nanoscale Pores through BCP-Based Metal Oxide Masks and Advanced Dry Etching
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- Contribution to journal › Article
- 2021
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Reduced Etch Lag and High Aspect Ratios by Deep Reactive Ion Etching (DRIE)
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- Contribution to journal › Article
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Mark
Embedded Microbubbles for Acoustic Manipulation of Single Cells and Microfluidic Applications
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- Contribution to journal › Article