LUP Statistics
Record
- Title
- Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning
- Type
- Student Paper
- Publ. year
- 2023
- Author/s
- Ilarionova, Yoana
- Department/s
- Solid State Physics; Department of Physics
- In LUP since
- 2023-01-31
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