LUP Statistics
Record
- Title
- Electron Beam Lithography on Ultra-thin Silicon Nitride Membranes - Target Manufacturing for Digital Holography
- Type
- Student Paper
- Publ. year
- 2010
- Author/s
- Lorek, Eleonora
- Department/s
- Atomic Physics
- In LUP since
- 2012-01-28
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