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Electron Beam Lithography on Ultra-thin Silicon Nitride Membranes - Target Manufacturing for Digital Holography

Lorek, Eleonora LU (2010) In Lund Reports in Atomic Physics PHYM01 20101
Atomic Physics
Please use this url to cite or link to this publication:
author
Lorek, Eleonora LU
supervisor
organization
course
PHYM01 20101
year
type
H2 - Master's Degree (Two Years)
subject
publication/series
Lund Reports in Atomic Physics
report number
LRAP-416
language
English
id
2260579
date added to LUP
2012-01-28 22:36:05
date last changed
2012-01-28 22:36:05
@misc{2260579,
  author       = {{Lorek, Eleonora}},
  language     = {{eng}},
  note         = {{Student Paper}},
  series       = {{Lund Reports in Atomic Physics}},
  title        = {{Electron Beam Lithography on Ultra-thin Silicon Nitride Membranes - Target Manufacturing for Digital Holography}},
  year         = {{2010}},
}