LUP Statistics
Record
- Title
- Droplet-target laser-plasma source for proximity x-ray lithography
- Type
- Journal Article
- Publ. year
- 1996
- Author/s
- Malmqvist, Lennart; Rymell, L; Hertz, H. M
- Department/s
- Atomic Physics
- In LUP since
- 2016-04-04
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