Chemical Mechanical Polishing of InSb
(2021) EITM02 20211Department of Electrical and Information Technology
Please use this url to cite or link to this publication:
http://lup.lub.lu.se/student-papers/record/9069263
- author
- Linehan, David LU
- supervisor
-
- Mattias Borg LU
- organization
- course
- EITM02 20211
- year
- 2021
- type
- H2 - Master's Degree (Two Years)
- subject
- keywords
- CMP, InSb, Chemical Mechanical Polishing, Indium, Antimonide, AFM, Profilometer, Ultrasonic, PVA, Smooth, Rough, Etch, Planarization
- report number
- LU/LTH-EIT 2021-855
- language
- English
- id
- 9069263
- date added to LUP
- 2022-01-20 13:46:22
- date last changed
- 2022-01-20 13:46:22
@misc{9069263,
author = {{Linehan, David}},
language = {{eng}},
note = {{Student Paper}},
title = {{Chemical Mechanical Polishing of InSb}},
year = {{2021}},
}