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Chemical Vapor Deposition of Titanium Oxycarbide

Dahmén, Carl Henrik LU (2020) MMTM01 20201
Production and Materials Engineering
Abstract
Ti(C,O) coatings have been generated in a hot wall CVD system on WC/Co, fine and coarse grained Ti(C,N), TiN, Cr and c-BN substrates. The research in this thesis has focused on deposition, characterization, and analysis in the perspective of the bonding layer of a coated insert. The precursors, H2, TiCl4, CO, temperature and pressure have been coupled to the texture using a Design of Experiment software. Samples have been characterized by XRD, SEM and TEM prepared by FIB. Analysis of crystal growth is based on a literature study of Ti(C,N), TiN, TiC and CO adsorption on transition metals. Rare up to 10μm long ”five-ling” multiple twinned crystals have been obtained at a pressure of 0.5 atm and 1000◦C. Favorable crystal growth on the... (More)
Ti(C,O) coatings have been generated in a hot wall CVD system on WC/Co, fine and coarse grained Ti(C,N), TiN, Cr and c-BN substrates. The research in this thesis has focused on deposition, characterization, and analysis in the perspective of the bonding layer of a coated insert. The precursors, H2, TiCl4, CO, temperature and pressure have been coupled to the texture using a Design of Experiment software. Samples have been characterized by XRD, SEM and TEM prepared by FIB. Analysis of crystal growth is based on a literature study of Ti(C,N), TiN, TiC and CO adsorption on transition metals. Rare up to 10μm long ”five-ling” multiple twinned crystals have been obtained at a pressure of 0.5 atm and 1000◦C. Favorable crystal growth on the Ti(C,N) substrate in the perspective of a bonding layer in a cutting tool insert was found for 1000◦C, TiCl4/CO≥1 in a H2 rich environment. The lattice parameter at different deposition conditions varied from 4.270 to 4.295 ̊A. Ti(C,O) coatings demonstrate thin, high index grains centered around the (111) twinning boundary, the literature analysis of CO adsorption indicates these are made possible due to the adsorption properties of CO. (Less)
Popular Abstract (Swedish)
Eller kemisk förångningsdeposition av titanoxykarbid. En undersökning av processparameterna i perspektivet av ett bindningslager i ett vändskär med hjälp av experimentdesignprogrammet MODDE. Titanoxykarbid är ett material med ovanliga egenskaper och bland annat har femfaldigt symmetriska multipeltvinnade kristaller och högindexerade kristallkorn blivit erhållna.
Please use this url to cite or link to this publication:
author
Dahmén, Carl Henrik LU
supervisor
organization
alternative title
CVD of Ti(C,O)
course
MMTM01 20201
year
type
H2 - Master's Degree (Two Years)
subject
keywords
CVD, Hard Coatings, Ti(C, O), CO, Five-ling twinned crystals.
language
English
id
9016092
date added to LUP
2020-06-25 15:21:11
date last changed
2020-06-25 15:21:11
@misc{9016092,
  abstract     = {{Ti(C,O) coatings have been generated in a hot wall CVD system on WC/Co, fine and coarse grained Ti(C,N), TiN, Cr and c-BN substrates. The research in this thesis has focused on deposition, characterization, and analysis in the perspective of the bonding layer of a coated insert. The precursors, H2, TiCl4, CO, temperature and pressure have been coupled to the texture using a Design of Experiment software. Samples have been characterized by XRD, SEM and TEM prepared by FIB. Analysis of crystal growth is based on a literature study of Ti(C,N), TiN, TiC and CO adsorption on transition metals. Rare up to 10μm long ”five-ling” multiple twinned crystals have been obtained at a pressure of 0.5 atm and 1000◦C. Favorable crystal growth on the Ti(C,N) substrate in the perspective of a bonding layer in a cutting tool insert was found for 1000◦C, TiCl4/CO≥1 in a H2 rich environment. The lattice parameter at different deposition conditions varied from 4.270 to 4.295 ̊A. Ti(C,O) coatings demonstrate thin, high index grains centered around the (111) twinning boundary, the literature analysis of CO adsorption indicates these are made possible due to the adsorption properties of CO.}},
  author       = {{Dahmén, Carl Henrik}},
  language     = {{eng}},
  note         = {{Student Paper}},
  title        = {{Chemical Vapor Deposition of Titanium Oxycarbide}},
  year         = {{2020}},
}