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BCP Lithography Defined Arrays of InAs NWs Grown Using MOVPE with Au Seeds

Landeke-Wilsmark, Björn (2022) PHYM01 20161
Faculty of Engineering, LTH
Solid State Physics
Abstract
In this report we outline a detailed process flow for a quick and inexpensive implementation of large dense arrays of InAs nanowires (NWs) grown in the reactive ion etching/etched (RIE) pores of a SiO2/SiNx mask on top of an InAs/Si(111) substrate. The self-assembled (hexagonally close-packed) pattern of poly(methyl-methacrylate) (PMMA) cylinders in a poly(styrene) (PS) matrix adopted by a linear diblock poly(styrene-block-methyl-methacrylate) P(S-b-MMA) block-copolymer (BCP) was transferred to the dielectric stack (consisting of a ≈10 nm plasma enhanced chemical vapour deposition/deposited (PECVD) SiNX layer topped by a thin atomic layer deposition/deposited (ALD) SiO2 film) using a two-step RIE procedure. Gold particles were then... (More)
In this report we outline a detailed process flow for a quick and inexpensive implementation of large dense arrays of InAs nanowires (NWs) grown in the reactive ion etching/etched (RIE) pores of a SiO2/SiNx mask on top of an InAs/Si(111) substrate. The self-assembled (hexagonally close-packed) pattern of poly(methyl-methacrylate) (PMMA) cylinders in a poly(styrene) (PS) matrix adopted by a linear diblock poly(styrene-block-methyl-methacrylate) P(S-b-MMA) block-copolymer (BCP) was transferred to the dielectric stack (consisting of a ≈10 nm plasma enhanced chemical vapour deposition/deposited (PECVD) SiNX layer topped by a thin atomic layer deposition/deposited (ALD) SiO2 film) using a two-step RIE procedure. Gold particles were then selectively deposited at the bottom of the etched cylinders by means of electrodeposition and were later used as catalytic seeds in the subsequent metal-organic vapour-phase epitaxy (MOVPE) growth of InAs NWs.

The P(S-b-MMA) BCP was used in conjunction with a graftable hydroxyl end-functionalized P(S-r-MMA) brush layer and the conditions for rapid thermal processing (RTP) grafting and various annealing techniques were evaluated. RTP was found to be a rapid, effective and convenient way of performing both the brush layer graft and the BCP anneal. This project was a successful proof-of-concept but each step in the process flow still needs further optimization to improve the fidelity of our version of BCP lithography. (Less)
Please use this url to cite or link to this publication:
author
Landeke-Wilsmark, Björn
supervisor
organization
course
PHYM01 20161
year
type
H2 - Master's Degree (Two Years)
subject
language
English
id
9075779
date added to LUP
2022-02-22 15:16:00
date last changed
2022-02-22 15:16:00
@misc{9075779,
  abstract     = {{In this report we outline a detailed process flow for a quick and inexpensive implementation of large dense arrays of InAs nanowires (NWs) grown in the reactive ion etching/etched (RIE) pores of a SiO2/SiNx mask on top of an InAs/Si(111) substrate. The self-assembled (hexagonally close-packed) pattern of poly(methyl-methacrylate) (PMMA) cylinders in a poly(styrene) (PS) matrix adopted by a linear diblock poly(styrene-block-methyl-methacrylate) P(S-b-MMA) block-copolymer (BCP) was transferred to the dielectric stack (consisting of a ≈10 nm plasma enhanced chemical vapour deposition/deposited (PECVD) SiNX layer topped by a thin atomic layer deposition/deposited (ALD) SiO2 film) using a two-step RIE procedure. Gold particles were then selectively deposited at the bottom of the etched cylinders by means of electrodeposition and were later used as catalytic seeds in the subsequent metal-organic vapour-phase epitaxy (MOVPE) growth of InAs NWs.

The P(S-b-MMA) BCP was used in conjunction with a graftable hydroxyl end-functionalized P(S-r-MMA) brush layer and the conditions for rapid thermal processing (RTP) grafting and various annealing techniques were evaluated. RTP was found to be a rapid, effective and convenient way of performing both the brush layer graft and the BCP anneal. This project was a successful proof-of-concept but each step in the process flow still needs further optimization to improve the fidelity of our version of BCP lithography.}},
  author       = {{Landeke-Wilsmark, Björn}},
  language     = {{eng}},
  note         = {{Student Paper}},
  title        = {{BCP Lithography Defined Arrays of InAs NWs Grown Using MOVPE with Au Seeds}},
  year         = {{2022}},
}