Advanced

Debris Elimination In A Droplet-target Laser-plasma Soft-x-ray Source

Rymell, L and Hertz, H. M (1995) In Review of Scientific Instruments 66(10). p.4916-4920
Abstract
A tabletop high-brightness line-emitting laser-plasma soft xray source utilizing single microscopic droplets as target is shown to produce several orders of magnitude less debris than conventional-target sources. Quantitative measurements of debris deposition rates and x-ray flux, at different directions around the droplet plasma are presented. With ethanol droplets and a. 10 Hz. 70 mJ/pulse laser, typically similar to 1 x 10(12) photons/(sr . pulse . line) are emitted from the C V and C VI lines in the water window. The debris deposition is further reduced with a small, localized gas jet shield. which is transparent to the x-rays. The deposition rate through the gas shield has been determined to be similar to 0.2 pg/(sr . pulse). Thus,... (More)
A tabletop high-brightness line-emitting laser-plasma soft xray source utilizing single microscopic droplets as target is shown to produce several orders of magnitude less debris than conventional-target sources. Quantitative measurements of debris deposition rates and x-ray flux, at different directions around the droplet plasma are presented. With ethanol droplets and a. 10 Hz. 70 mJ/pulse laser, typically similar to 1 x 10(12) photons/(sr . pulse . line) are emitted from the C V and C VI lines in the water window. The debris deposition is further reduced with a small, localized gas jet shield. which is transparent to the x-rays. The deposition rate through the gas shield has been determined to be similar to 0.2 pg/(sr . pulse). Thus, this droplet-target laser-plasma x-ray source is four orders-of-magnitude cleaner than a low-debris plastic tape target laser plasma of similar brightness, making it useful for x-ray microscopy and lithography. (C) 1995 American Institute of Physics. (Less)
Please use this url to cite or link to this publication:
author
publishing date
type
Contribution to journal
publication status
published
subject
in
Review of Scientific Instruments
volume
66
issue
10
pages
4916 - 4920
publisher
American Institute of Physics
external identifiers
  • Scopus:0029390160
ISSN
1089-7623
DOI
10.1063/1.1146174
language
English
LU publication?
no
id
27e68b6e-de23-48e6-92e8-a9a657dd85ca (old id 2259230)
date added to LUP
2012-02-10 01:04:23
date last changed
2016-10-13 04:30:44
@misc{27e68b6e-de23-48e6-92e8-a9a657dd85ca,
  abstract     = {A tabletop high-brightness line-emitting laser-plasma soft xray source utilizing single microscopic droplets as target is shown to produce several orders of magnitude less debris than conventional-target sources. Quantitative measurements of debris deposition rates and x-ray flux, at different directions around the droplet plasma are presented. With ethanol droplets and a. 10 Hz. 70 mJ/pulse laser, typically similar to 1 x 10(12) photons/(sr . pulse . line) are emitted from the C V and C VI lines in the water window. The debris deposition is further reduced with a small, localized gas jet shield. which is transparent to the x-rays. The deposition rate through the gas shield has been determined to be similar to 0.2 pg/(sr . pulse). Thus, this droplet-target laser-plasma x-ray source is four orders-of-magnitude cleaner than a low-debris plastic tape target laser plasma of similar brightness, making it useful for x-ray microscopy and lithography. (C) 1995 American Institute of Physics.},
  author       = {Rymell, L and Hertz, H. M},
  issn         = {1089-7623},
  language     = {eng},
  number       = {10},
  pages        = {4916--4920},
  publisher    = {ARRAY(0x8dd3c88)},
  series       = {Review of Scientific Instruments},
  title        = {Debris Elimination In A Droplet-target Laser-plasma Soft-x-ray Source},
  url          = {http://dx.doi.org/10.1063/1.1146174},
  volume       = {66},
  year         = {1995},
}