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Fabrication of micro-mechanical sensors with the polymer SU-8

Keller, S.; Tenje, Maria LU ; Noeth, N.; Dohn, S.; Blagoi, G.; Haefliger, D. and Boisen, A. (2009) Eurosensors XXIII
Abstract
In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.
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Eurosensors XXIII
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English
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6793f9cc-045d-4dd5-b3aa-e98241846a31 (old id 3233217)
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2012-12-10 14:56:39
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@misc{6793f9cc-045d-4dd5-b3aa-e98241846a31,
  abstract     = {In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.},
  author       = {Keller, S. and Tenje, Maria and Noeth, N. and Dohn, S. and Blagoi, G. and Haefliger, D. and Boisen, A.},
  language     = {eng},
  title        = {Fabrication of micro-mechanical sensors with the polymer SU-8},
  year         = {2009},
}