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Sloped side walls in SU-8 structures with ‘Step and Flash’

Tenje, Maria LU ; Hübner, J. and Boisen, A. (2005) 31st International Conference on Micro and Nano Engineering (MNE 2005)
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author
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Contribution to conference
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published
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conference name
31st International Conference on Micro and Nano Engineering (MNE 2005)
language
English
LU publication?
no
id
e6b026e2-3adc-440e-bccf-c7b6986507c8 (old id 3290191)
date added to LUP
2012-12-20 10:51:39
date last changed
2016-06-29 09:18:04
@misc{e6b026e2-3adc-440e-bccf-c7b6986507c8,
  author       = {Tenje, Maria and Hübner, J. and Boisen, A.},
  language     = {eng},
  title        = {Sloped side walls in SU-8 structures with ‘Step and Flash’},
  year         = {2005},
}