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Real time observation of ultrathin epitaxial oxide growth during alloy oxidation

Stierle, A.; Streitel, R.; Nolte, P.; Vlad, A.; Costina, I.; Marsman, M.; Kresse, G.; Lundgren, Edvin LU ; Andersen, Jesper N LU and Franchy, R., et al. (2007) In New Journal of Physics 9. p.331-331
Abstract
We have studied the thermal oxidation of the intermetallic alloy CoGa in situ, in real time on the atomic scale, during the growth of an ultrathin, epitaxial Ga oxide layer. On the basis of an extended set of surface x-ray diffraction data, density functional theory calculations and core level spectroscopy data, we find that the oxide film consists of an oxygen ion double layer, which contains the basic building block of bulk beta- Ga2O3. The oxide formation takes place via the nucleation of two- dimensional, anisotropic oxide islands which laterally grow and coalesce. A dramatic increase of the oxide island size is observed for low O-2 pressures in the 10(-8) mbar regime, which we interpret as the onset of a step flow like growth mode.... (More)
We have studied the thermal oxidation of the intermetallic alloy CoGa in situ, in real time on the atomic scale, during the growth of an ultrathin, epitaxial Ga oxide layer. On the basis of an extended set of surface x-ray diffraction data, density functional theory calculations and core level spectroscopy data, we find that the oxide film consists of an oxygen ion double layer, which contains the basic building block of bulk beta- Ga2O3. The oxide formation takes place via the nucleation of two- dimensional, anisotropic oxide islands which laterally grow and coalesce. A dramatic increase of the oxide island size is observed for low O-2 pressures in the 10(-8) mbar regime, which we interpret as the onset of a step flow like growth mode. This allows us to conclude that thermal oxidation can be considered as a hetero- epitaxial growth process, that follows similar atomistic growth principles to molecular beam epitaxy. As a consequence, the structural perfection of the oxide layer can be tailored by the appropriate choice of oxygen pressure and temperature. (Less)
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Contribution to journal
publication status
published
subject
in
New Journal of Physics
volume
9
pages
331 - 331
publisher
IOP Publishing
external identifiers
  • WOS:000249702700002
  • Scopus:34748895435
ISSN
1367-2630
DOI
10.1088/1367-2630/9/9/331
language
English
LU publication?
yes
id
572a4c19-8ec9-44f1-8647-25d2d2c83560 (old id 764764)
date added to LUP
2007-12-17 17:47:13
date last changed
2016-12-04 04:46:21
@misc{572a4c19-8ec9-44f1-8647-25d2d2c83560,
  abstract     = {We have studied the thermal oxidation of the intermetallic alloy CoGa in situ, in real time on the atomic scale, during the growth of an ultrathin, epitaxial Ga oxide layer. On the basis of an extended set of surface x-ray diffraction data, density functional theory calculations and core level spectroscopy data, we find that the oxide film consists of an oxygen ion double layer, which contains the basic building block of bulk beta- Ga2O3. The oxide formation takes place via the nucleation of two- dimensional, anisotropic oxide islands which laterally grow and coalesce. A dramatic increase of the oxide island size is observed for low O-2 pressures in the 10(-8) mbar regime, which we interpret as the onset of a step flow like growth mode. This allows us to conclude that thermal oxidation can be considered as a hetero- epitaxial growth process, that follows similar atomistic growth principles to molecular beam epitaxy. As a consequence, the structural perfection of the oxide layer can be tailored by the appropriate choice of oxygen pressure and temperature.},
  author       = {Stierle, A. and Streitel, R. and Nolte, P. and Vlad, A. and Costina, I. and Marsman, M. and Kresse, G. and Lundgren, Edvin and Andersen, Jesper N and Franchy, R. and Dosch, H.},
  issn         = {1367-2630},
  language     = {eng},
  pages        = {331--331},
  publisher    = {ARRAY(0x8837c68)},
  series       = {New Journal of Physics},
  title        = {Real time observation of ultrathin epitaxial oxide growth during alloy oxidation},
  url          = {http://dx.doi.org/10.1088/1367-2630/9/9/331},
  volume       = {9},
  year         = {2007},
}