Selective etching of InP in InAs/InP nanowires resulting in 11 nm nanogaps
(2016) 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 p.1489-1492- Abstract
We demonstrate a wet chemical method to selectively etch InP segments within InAs/InP heterostructure nanowires based on a photo-assisted HAc/HBr solution etching process. We successfully etched InP segments ranging from 60 nm down to about 10 nm in size.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/e7b098cd-bf75-4d45-9e54-f3138d0c60d9
- author
- Schukfeh, Muhammed Ihab ; Hansen, Allan ; Tornow, Marc ; Storm, Kristian LU ; Thelander, Kimberly Dick LU ; Thelander, Claes LU ; Samuelson, Lars LU ; Hinze, Peter ; Weimann, Thomas and Wanderka, Nelia
- organization
- publishing date
- 2016-01-20
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- keywords
- heterostructure nanowire, InAs/InP, nanogap electrodes, selective etching
- host publication
- IEEE-NANO 2015 - 15th International Conference on Nanotechnology
- article number
- 7388924
- pages
- 4 pages
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- conference name
- 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015
- conference location
- Rome, Italy
- conference dates
- 2015-07-27 - 2015-07-30
- external identifiers
-
- scopus:84964389237
- ISBN
- 9781467381550
- DOI
- 10.1109/NANO.2015.7388924
- language
- English
- LU publication?
- yes
- id
- e7b098cd-bf75-4d45-9e54-f3138d0c60d9
- date added to LUP
- 2016-10-05 10:30:35
- date last changed
- 2023-09-12 01:17:10
@inproceedings{e7b098cd-bf75-4d45-9e54-f3138d0c60d9, abstract = {{<p>We demonstrate a wet chemical method to selectively etch InP segments within InAs/InP heterostructure nanowires based on a photo-assisted HAc/HBr solution etching process. We successfully etched InP segments ranging from 60 nm down to about 10 nm in size.</p>}}, author = {{Schukfeh, Muhammed Ihab and Hansen, Allan and Tornow, Marc and Storm, Kristian and Thelander, Kimberly Dick and Thelander, Claes and Samuelson, Lars and Hinze, Peter and Weimann, Thomas and Wanderka, Nelia}}, booktitle = {{IEEE-NANO 2015 - 15th International Conference on Nanotechnology}}, isbn = {{9781467381550}}, keywords = {{heterostructure nanowire; InAs/InP; nanogap electrodes; selective etching}}, language = {{eng}}, month = {{01}}, pages = {{1489--1492}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, title = {{Selective etching of InP in InAs/InP nanowires resulting in 11 nm nanogaps}}, url = {{http://dx.doi.org/10.1109/NANO.2015.7388924}}, doi = {{10.1109/NANO.2015.7388924}}, year = {{2016}}, }