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X-ray focusing with efficient high-NA multilayer Laue lenses

Bajt, Saša; Prasciolu, Mauro; Fleckenstein, Holger; Domaracký, Martin; Chapman, Henry N; Morgan, Andrew J; Yefanov, Oleksandr; Messerschmidt, Marc; Du, Yang and Murray, Kevin T, et al. (2018) In Light, science & applications 7. p.17162-17162
Abstract

Multilayer Laue lenses are volume diffraction elements for the efficient focusing of X-rays. With a new manufacturing technique that we introduced, it is possible to fabricate lenses of sufficiently high numerical aperture (NA) to achieve focal spot sizes below 10 nm. The alternating layers of the materials that form the lens must span a broad range of thicknesses on the nanometer scale to achieve the necessary range of X-ray deflection angles required to achieve a high NA. This poses a challenge to both the accuracy of the deposition process and the control of the materials properties, which often vary with layer thickness. We introduced a new pair of materials-tungsten carbide and silicon carbide-to prepare layered structures with... (More)

Multilayer Laue lenses are volume diffraction elements for the efficient focusing of X-rays. With a new manufacturing technique that we introduced, it is possible to fabricate lenses of sufficiently high numerical aperture (NA) to achieve focal spot sizes below 10 nm. The alternating layers of the materials that form the lens must span a broad range of thicknesses on the nanometer scale to achieve the necessary range of X-ray deflection angles required to achieve a high NA. This poses a challenge to both the accuracy of the deposition process and the control of the materials properties, which often vary with layer thickness. We introduced a new pair of materials-tungsten carbide and silicon carbide-to prepare layered structures with smooth and sharp interfaces and with no material phase transitions that hampered the manufacture of previous lenses. Using a pair of multilayer Laue lenses (MLLs) fabricated from this system, we achieved a two-dimensional focus of 8.4 × 6.8 nm2 at a photon energy of 16.3 keV with high diffraction efficiency and demonstrated scanning-based imaging of samples with a resolution well below 10 nm. The high NA also allowed projection holographic imaging with strong phase contrast over a large range of magnifications. An error analysis indicates the possibility of achieving 1 nm focusing.

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publication status
published
in
Light, science & applications
volume
7
pages
17162 - 17162
publisher
Nature Publishing Group
ISSN
2047-7538
DOI
10.1038/lsa.2017.162
language
English
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no
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0c1e538d-e404-4b83-9e68-3aff5248227f
date added to LUP
2019-03-29 16:51:53
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2019-05-17 18:35:27
@article{0c1e538d-e404-4b83-9e68-3aff5248227f,
  abstract     = {<p>Multilayer Laue lenses are volume diffraction elements for the efficient focusing of X-rays. With a new manufacturing technique that we introduced, it is possible to fabricate lenses of sufficiently high numerical aperture (NA) to achieve focal spot sizes below 10 nm. The alternating layers of the materials that form the lens must span a broad range of thicknesses on the nanometer scale to achieve the necessary range of X-ray deflection angles required to achieve a high NA. This poses a challenge to both the accuracy of the deposition process and the control of the materials properties, which often vary with layer thickness. We introduced a new pair of materials-tungsten carbide and silicon carbide-to prepare layered structures with smooth and sharp interfaces and with no material phase transitions that hampered the manufacture of previous lenses. Using a pair of multilayer Laue lenses (MLLs) fabricated from this system, we achieved a two-dimensional focus of 8.4 × 6.8 nm2 at a photon energy of 16.3 keV with high diffraction efficiency and demonstrated scanning-based imaging of samples with a resolution well below 10 nm. The high NA also allowed projection holographic imaging with strong phase contrast over a large range of magnifications. An error analysis indicates the possibility of achieving 1 nm focusing.</p>},
  author       = {Bajt, Saša and Prasciolu, Mauro and Fleckenstein, Holger and Domaracký, Martin and Chapman, Henry N and Morgan, Andrew J and Yefanov, Oleksandr and Messerschmidt, Marc and Du, Yang and Murray, Kevin T and Mariani, Valerio and Kuhn, Manuela and Aplin, Steven and Pande, Kanupriya and Villanueva-Perez, Pablo and Stachnik, Karolina and Chen, Joe Pj and Andrejczuk, Andrzej and Meents, Alke and Burkhardt, Anja and Pennicard, David and Huang, Xiaojing and Yan, Hanfei and Nazaretski, Evgeny and Chu, Yong S and Hamm, Christian E},
  issn         = {2047-7538},
  language     = {eng},
  pages        = {17162--17162},
  publisher    = {Nature Publishing Group},
  series       = {Light, science & applications},
  title        = {X-ray focusing with efficient high-NA multilayer Laue lenses},
  url          = {http://dx.doi.org/10.1038/lsa.2017.162},
  volume       = {7},
  year         = {2018},
}