Novel Lift-off Process for DUV Displacement Talbot Lithography
Graczyk, Mariusz LU ; Gomez, Victor LU
; Huffman, Maria
LU
and Maximov, Ivan
LU
(2019)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/0cc2b181-e450-4e46-958a-371db63bc167
- author
- Graczyk, Mariusz
LU
; Gomez, Victor
LU
; Huffman, Maria
LU
and Maximov, Ivan
LU
- organization
- publishing date
- 2019-09-23
- type
- Contribution to conference
- publication status
- unpublished
- subject
- language
- English
- LU publication?
- yes
- id
- 0cc2b181-e450-4e46-958a-371db63bc167
- date added to LUP
- 2020-01-21 14:18:25
- date last changed
- 2022-04-06 12:37:56
@misc{0cc2b181-e450-4e46-958a-371db63bc167,
author = {{Graczyk, Mariusz and Gomez, Victor and Huffman, Maria and Maximov, Ivan}},
language = {{eng}},
month = {{09}},
title = {{Novel Lift-off Process for DUV Displacement Talbot Lithography}},
year = {{2019}},
}