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High performance slit-less spectrometer for soft x-ray emission spectroscopy

Tokushima, T. LU orcid ; Harada, Yoshihisa ; Ohashi, H. ; Senba, Y. and Shin, S. (2006) In Review of Scientific Instruments 77(6).
Abstract

We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/ΔE) is expected using a focused beam whose spot size is 5 μm full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.

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author
; ; ; and
publishing date
type
Contribution to journal
publication status
published
subject
in
Review of Scientific Instruments
volume
77
issue
6
article number
063107
publisher
American Institute of Physics (AIP)
external identifiers
  • scopus:33745713677
ISSN
0034-6748
DOI
10.1063/1.2204623
language
English
LU publication?
no
id
0fd1f32e-853e-4765-9856-9e178f5baa63
date added to LUP
2023-08-25 16:59:16
date last changed
2025-10-14 12:41:40
@article{0fd1f32e-853e-4765-9856-9e178f5baa63,
  abstract     = {{<p>We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/ΔE) is expected using a focused beam whose spot size is 5 μm full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.</p>}},
  author       = {{Tokushima, T. and Harada, Yoshihisa and Ohashi, H. and Senba, Y. and Shin, S.}},
  issn         = {{0034-6748}},
  language     = {{eng}},
  number       = {{6}},
  publisher    = {{American Institute of Physics (AIP)}},
  series       = {{Review of Scientific Instruments}},
  title        = {{High performance slit-less spectrometer for soft x-ray emission spectroscopy}},
  url          = {{http://dx.doi.org/10.1063/1.2204623}},
  doi          = {{10.1063/1.2204623}},
  volume       = {{77}},
  year         = {{2006}},
}