Advanced

Dissociative NH3 adsorption on the Si(100)2 × 1 surface at 300 K

Larsson, Christer LU and Flodström, Anders (1991) In Surface Science 241(3). p.353-356
Abstract
High resolution electron energy loss spectroscopy has been used to determine how NH3 adsorbs on the Si(100)2 × 1 surface at 300 K. We find that the NH3 molecules dissociate into NH2 and H on adsorption. Combination bands, overtones and double losses for the Si---NH2 group are observed. An anneal to 800 K is sufficient to dissociate the adsorbed NH2 groups while the majority of the Si---H bonds remain intact. An anneal to 1100 K is enough to break the Si-H bonds and start the formation of silicon nitride.
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Surface Science
volume
241
issue
3
pages
353 - 356
publisher
Elsevier
external identifiers
  • scopus:0026412504
ISSN
0039-6028
DOI
10.1016/0039-6028(91)90095-A
language
English
LU publication?
no
id
9551e52c-dbb1-492a-b20a-b04e8c3f94c3 (old id 1056617)
date added to LUP
2008-04-16 14:34:55
date last changed
2017-07-23 04:32:19
@article{9551e52c-dbb1-492a-b20a-b04e8c3f94c3,
  abstract     = {High resolution electron energy loss spectroscopy has been used to determine how NH3 adsorbs on the Si(100)2 × 1 surface at 300 K. We find that the NH3 molecules dissociate into NH2 and H on adsorption. Combination bands, overtones and double losses for the Si---NH2 group are observed. An anneal to 800 K is sufficient to dissociate the adsorbed NH2 groups while the majority of the Si---H bonds remain intact. An anneal to 1100 K is enough to break the Si-H bonds and start the formation of silicon nitride.},
  author       = {Larsson, Christer and Flodström, Anders},
  issn         = {0039-6028},
  language     = {eng},
  number       = {3},
  pages        = {353--356},
  publisher    = {Elsevier},
  series       = {Surface Science},
  title        = {Dissociative NH3 adsorption on the Si(100)2 × 1 surface at 300 K},
  url          = {http://dx.doi.org/10.1016/0039-6028(91)90095-A},
  volume       = {241},
  year         = {1991},
}