Nanoscale Scanning Probe Thermometry
(2018) 24th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2018- Abstract
We present further development and application examples of a thermometry approach capable of producing real-space temperature maps of operating nanoscale devices with sub-10nm resolution. The technique relies on scanning thermal microscopy with a resistive element coupled to a cantilevered tip. The resistive element acts both as integrated heater and as sensing element. A modulated temperature field is generated in the sample by exciting the device under investigation with an electrical AC bias. A map of the sample's temperature response due to different physical effects, such as Joule heating and thermoelectric effects, can be inferred from the demodulated sensor signal. As application examples, we demonstrate the investigation of... (More)
We present further development and application examples of a thermometry approach capable of producing real-space temperature maps of operating nanoscale devices with sub-10nm resolution. The technique relies on scanning thermal microscopy with a resistive element coupled to a cantilevered tip. The resistive element acts both as integrated heater and as sensing element. A modulated temperature field is generated in the sample by exciting the device under investigation with an electrical AC bias. A map of the sample's temperature response due to different physical effects, such as Joule heating and thermoelectric effects, can be inferred from the demodulated sensor signal. As application examples, we demonstrate the investigation of thermoelectric heating/cooling at crystal phase heterostructures in InAs nanowires and Joule self-heating of individual multi-walled carbon nanotubes.
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- author
- Könemann, Fabian ; Vollmann, Morten ; Menges, Fabian ; Chen, I. Ju LU ; Ghazali, Norizzawati Mohd ; Yamaguchi, Tomohiro ; Ishibashi, Koji ; Thelander, Claes LU and Gotsmann, Bernd
- organization
- publishing date
- 2018-12-27
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- host publication
- THERMINIC 2018 - 24th International Workshop on Thermal Investigations of ICs and Systems, Proceedings
- article number
- 8593312
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- conference name
- 24th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2018
- conference location
- Stockholm, Sweden
- conference dates
- 2018-09-26 - 2018-09-28
- external identifiers
-
- scopus:85061481111
- ISBN
- 9781538667590
- DOI
- 10.1109/THERMINIC.2018.8593312
- language
- English
- LU publication?
- yes
- id
- 134acf5f-c226-4c42-9a05-f0b030820e46
- date added to LUP
- 2019-02-25 08:01:27
- date last changed
- 2023-10-20 23:48:13
@inproceedings{134acf5f-c226-4c42-9a05-f0b030820e46, abstract = {{<p>We present further development and application examples of a thermometry approach capable of producing real-space temperature maps of operating nanoscale devices with sub-10nm resolution. The technique relies on scanning thermal microscopy with a resistive element coupled to a cantilevered tip. The resistive element acts both as integrated heater and as sensing element. A modulated temperature field is generated in the sample by exciting the device under investigation with an electrical AC bias. A map of the sample's temperature response due to different physical effects, such as Joule heating and thermoelectric effects, can be inferred from the demodulated sensor signal. As application examples, we demonstrate the investigation of thermoelectric heating/cooling at crystal phase heterostructures in InAs nanowires and Joule self-heating of individual multi-walled carbon nanotubes.</p>}}, author = {{Könemann, Fabian and Vollmann, Morten and Menges, Fabian and Chen, I. Ju and Ghazali, Norizzawati Mohd and Yamaguchi, Tomohiro and Ishibashi, Koji and Thelander, Claes and Gotsmann, Bernd}}, booktitle = {{THERMINIC 2018 - 24th International Workshop on Thermal Investigations of ICs and Systems, Proceedings}}, isbn = {{9781538667590}}, language = {{eng}}, month = {{12}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, title = {{Nanoscale Scanning Probe Thermometry}}, url = {{http://dx.doi.org/10.1109/THERMINIC.2018.8593312}}, doi = {{10.1109/THERMINIC.2018.8593312}}, year = {{2018}}, }