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Nanoscale Scanning Probe Thermometry

Könemann, Fabian ; Vollmann, Morten ; Menges, Fabian ; Chen, I. Ju LU ; Ghazali, Norizzawati Mohd ; Yamaguchi, Tomohiro ; Ishibashi, Koji ; Thelander, Claes LU and Gotsmann, Bernd (2018) 24th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2018
Abstract

We present further development and application examples of a thermometry approach capable of producing real-space temperature maps of operating nanoscale devices with sub-10nm resolution. The technique relies on scanning thermal microscopy with a resistive element coupled to a cantilevered tip. The resistive element acts both as integrated heater and as sensing element. A modulated temperature field is generated in the sample by exciting the device under investigation with an electrical AC bias. A map of the sample's temperature response due to different physical effects, such as Joule heating and thermoelectric effects, can be inferred from the demodulated sensor signal. As application examples, we demonstrate the investigation of... (More)

We present further development and application examples of a thermometry approach capable of producing real-space temperature maps of operating nanoscale devices with sub-10nm resolution. The technique relies on scanning thermal microscopy with a resistive element coupled to a cantilevered tip. The resistive element acts both as integrated heater and as sensing element. A modulated temperature field is generated in the sample by exciting the device under investigation with an electrical AC bias. A map of the sample's temperature response due to different physical effects, such as Joule heating and thermoelectric effects, can be inferred from the demodulated sensor signal. As application examples, we demonstrate the investigation of thermoelectric heating/cooling at crystal phase heterostructures in InAs nanowires and Joule self-heating of individual multi-walled carbon nanotubes.

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Please use this url to cite or link to this publication:
author
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
host publication
THERMINIC 2018 - 24th International Workshop on Thermal Investigations of ICs and Systems, Proceedings
article number
8593312
publisher
Institute of Electrical and Electronics Engineers Inc.
conference name
24th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2018
conference location
Stockholm, Sweden
conference dates
2018-09-26 - 2018-09-28
external identifiers
  • scopus:85061481111
ISBN
9781538667590
DOI
10.1109/THERMINIC.2018.8593312
language
English
LU publication?
yes
id
134acf5f-c226-4c42-9a05-f0b030820e46
date added to LUP
2019-02-25 08:01:27
date last changed
2020-04-02 02:21:44
@inproceedings{134acf5f-c226-4c42-9a05-f0b030820e46,
  abstract     = {<p>We present further development and application examples of a thermometry approach capable of producing real-space temperature maps of operating nanoscale devices with sub-10nm resolution. The technique relies on scanning thermal microscopy with a resistive element coupled to a cantilevered tip. The resistive element acts both as integrated heater and as sensing element. A modulated temperature field is generated in the sample by exciting the device under investigation with an electrical AC bias. A map of the sample's temperature response due to different physical effects, such as Joule heating and thermoelectric effects, can be inferred from the demodulated sensor signal. As application examples, we demonstrate the investigation of thermoelectric heating/cooling at crystal phase heterostructures in InAs nanowires and Joule self-heating of individual multi-walled carbon nanotubes.</p>},
  author       = {Könemann, Fabian and Vollmann, Morten and Menges, Fabian and Chen, I. Ju and Ghazali, Norizzawati Mohd and Yamaguchi, Tomohiro and Ishibashi, Koji and Thelander, Claes and Gotsmann, Bernd},
  booktitle    = {THERMINIC 2018 - 24th International Workshop on Thermal Investigations of ICs and Systems, Proceedings},
  isbn         = {9781538667590},
  language     = {eng},
  month        = {12},
  publisher    = {Institute of Electrical and Electronics Engineers Inc.},
  title        = {Nanoscale Scanning Probe Thermometry},
  url          = {http://dx.doi.org/10.1109/THERMINIC.2018.8593312},
  doi          = {10.1109/THERMINIC.2018.8593312},
  year         = {2018},
}