Advanced

A new multifunctional platform based on high-aspect ratio interdigitated NEMS structures

Ghatnekar-Nilsson, Sara LU ; Karlsson, Ivan LU ; Kvennefors, Anders LU ; Luo, Gang LU ; Zela, Vilma LU ; Ärlelid, Mats LU ; Parker, Thomas LU ; Montelius, Lars LU and Andrej, Litwin (2009) In Nanotechnology 20(17).
Abstract
A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also... (More)
A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also demonstrated. We also show that the same device can function as a varactor for electronic circuits based on its large tunable capacitive range. (Less)
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
CANTILEVER SENSORS NANOSENSORS LITHOGRAPHY BEAM
in
Nanotechnology
volume
20
issue
17
publisher
IOP Publishing
external identifiers
  • wos:000264950600012
  • scopus:65549135932
ISSN
0957-4484
DOI
10.1088/0957-4484/20/17/175502
language
English
LU publication?
yes
id
ae853eb0-a95d-4591-afd9-25a07f0f5d52 (old id 1400551)
date added to LUP
2015-09-10 20:09:31
date last changed
2017-05-21 03:36:43
@article{ae853eb0-a95d-4591-afd9-25a07f0f5d52,
  abstract     = {A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also demonstrated. We also show that the same device can function as a varactor for electronic circuits based on its large tunable capacitive range.},
  articleno    = {175502},
  author       = {Ghatnekar-Nilsson, Sara and Karlsson, Ivan and Kvennefors, Anders and Luo, Gang and Zela, Vilma and Ärlelid, Mats and Parker, Thomas and Montelius, Lars and Andrej, Litwin},
  issn         = {0957-4484},
  keyword      = {CANTILEVER SENSORS NANOSENSORS LITHOGRAPHY BEAM},
  language     = {eng},
  number       = {17},
  publisher    = {IOP Publishing},
  series       = {Nanotechnology},
  title        = {A new multifunctional platform based on high-aspect ratio interdigitated NEMS structures},
  url          = {http://dx.doi.org/10.1088/0957-4484/20/17/175502},
  volume       = {20},
  year         = {2009},
}