Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications
(2002) IEEE Ultrasonics Symposium, 2002 p.1023-1026- Abstract
- The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography... (More)
- The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/610760
- author
- Törndahl, Marcus LU ; Almqvist, Monica LU ; Wallman, Lars LU ; Persson, Hans W LU and Lindström, Kjell LU
- organization
- publishing date
- 2002
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- keywords
- membrane thickness, distance working range, linearity plots, SNR, S/N ratio, FFT spectra, metallized polymeric membrane, pyramid-shaped cavities, Si backplate, light diffraction tomography, transducer radiation field, capacitive micromachined US transducer, air applications, piezoelectric US transducer, ultrasonic transducer comparison, cavity size, pressure maps, bias voltage, bandwidth, 450 kHz, Si
- host publication
- 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)
- pages
- 1023 - 1026
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- conference name
- IEEE Ultrasonics Symposium, 2002
- conference location
- Munich, Germany
- conference dates
- 2002-10-08 - 2002-10-11
- external identifiers
-
- wos:000182111700228
- scopus:0036990242
- ISBN
- 0-7803-7582-3
- DOI
- 10.1109/ULTSYM.2002.1192469
- language
- English
- LU publication?
- yes
- id
- 16f61a6a-b985-4321-b600-284f97257420 (old id 610760)
- date added to LUP
- 2016-04-04 10:42:10
- date last changed
- 2022-02-28 18:47:39
@inproceedings{16f61a6a-b985-4321-b600-284f97257420, abstract = {{The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers}}, author = {{Törndahl, Marcus and Almqvist, Monica and Wallman, Lars and Persson, Hans W and Lindström, Kjell}}, booktitle = {{2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)}}, isbn = {{0-7803-7582-3}}, keywords = {{membrane thickness; distance working range; linearity plots; SNR; S/N ratio; FFT spectra; metallized polymeric membrane; pyramid-shaped cavities; Si backplate; light diffraction tomography; transducer radiation field; capacitive micromachined US transducer; air applications; piezoelectric US transducer; ultrasonic transducer comparison; cavity size; pressure maps; bias voltage; bandwidth; 450 kHz; Si}}, language = {{eng}}, pages = {{1023--1026}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, title = {{Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications}}, url = {{http://dx.doi.org/10.1109/ULTSYM.2002.1192469}}, doi = {{10.1109/ULTSYM.2002.1192469}}, year = {{2002}}, }