EXAFS measurements of metal-decorated nanocavities in Si
(2003) 3rd International Conference on Synchrotron Radiation in Materials Science 199. p.179-184- Abstract
- This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/318505
- author
- Azevedo, GD ; Ridgway, MC ; Betlehem, J ; Yu, KM ; Glover, Chris LU and Foran, GJ
- organization
- publishing date
- 2003
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- keywords
- voids, gettering, silicon, EXAFS, cavities
- host publication
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- volume
- 199
- pages
- 179 - 184
- publisher
- Elsevier
- conference name
- 3rd International Conference on Synchrotron Radiation in Materials Science
- conference location
- Singapore, Singapore
- conference dates
- 2002-01-21 - 2002-01-24
- external identifiers
-
- wos:000180925400036
- scopus:0037244293
- ISSN
- 0168-583X
- DOI
- 10.1016/S0168-583X(02)01430-1
- language
- English
- LU publication?
- yes
- id
- 1a998dd4-1569-4558-8a6a-7b6c954b0b93 (old id 318505)
- date added to LUP
- 2016-04-01 15:27:29
- date last changed
- 2022-01-28 05:27:08
@inproceedings{1a998dd4-1569-4558-8a6a-7b6c954b0b93, abstract = {{This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.}}, author = {{Azevedo, GD and Ridgway, MC and Betlehem, J and Yu, KM and Glover, Chris and Foran, GJ}}, booktitle = {{Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}}, issn = {{0168-583X}}, keywords = {{voids; gettering; silicon; EXAFS; cavities}}, language = {{eng}}, pages = {{179--184}}, publisher = {{Elsevier}}, title = {{EXAFS measurements of metal-decorated nanocavities in Si}}, url = {{http://dx.doi.org/10.1016/S0168-583X(02)01430-1}}, doi = {{10.1016/S0168-583X(02)01430-1}}, volume = {{199}}, year = {{2003}}, }