Liquid-jet target for laser-plasma soft x-ray generation
(1996) In Review of Scientific Instruments 67(12). p.4150-4153- Abstract
- We describe a new liquid-target system for low-debris laser-plasma soft x-ray sources. The system is based on a microscopic liquid jet and is experimentally evaluated for 0.7-1 keV proximity lithography and water-window x-ray microscopy applications. Compared to an existing liquid-droplet target, this target system has the same low debris emission, high x-ray photon flux, and narrow spectral bandwidth. The advantages of the liquid-jet target include improved x-ray flux stability, increased range of suitable target liquids, and elimination of the need for temporal synchronization, thereby allowing less complex laser systems to be used. (C) 1996 American Institute of Physics.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/2258967
- author
- Malmqvist, Lennart LU ; Rymell, L ; Berglund, M and Hertz, H. M
- organization
- publishing date
- 1996
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Review of Scientific Instruments
- volume
- 67
- issue
- 12
- pages
- 4150 - 4153
- publisher
- American Institute of Physics (AIP)
- external identifiers
-
- scopus:0030400850
- ISSN
- 1089-7623
- DOI
- 10.1063/1.1147561
- language
- English
- LU publication?
- yes
- id
- c80608a0-115c-4bc7-8a78-8efb68983c1d (old id 2258967)
- date added to LUP
- 2016-04-04 09:37:15
- date last changed
- 2022-01-29 18:43:22
@article{c80608a0-115c-4bc7-8a78-8efb68983c1d, abstract = {{We describe a new liquid-target system for low-debris laser-plasma soft x-ray sources. The system is based on a microscopic liquid jet and is experimentally evaluated for 0.7-1 keV proximity lithography and water-window x-ray microscopy applications. Compared to an existing liquid-droplet target, this target system has the same low debris emission, high x-ray photon flux, and narrow spectral bandwidth. The advantages of the liquid-jet target include improved x-ray flux stability, increased range of suitable target liquids, and elimination of the need for temporal synchronization, thereby allowing less complex laser systems to be used. (C) 1996 American Institute of Physics.}}, author = {{Malmqvist, Lennart and Rymell, L and Berglund, M and Hertz, H. M}}, issn = {{1089-7623}}, language = {{eng}}, number = {{12}}, pages = {{4150--4153}}, publisher = {{American Institute of Physics (AIP)}}, series = {{Review of Scientific Instruments}}, title = {{Liquid-jet target for laser-plasma soft x-ray generation}}, url = {{https://lup.lub.lu.se/search/files/5372865/2297446.pdf}}, doi = {{10.1063/1.1147561}}, volume = {{67}}, year = {{1996}}, }