Debris Elimination In A Droplet-target Laser-plasma Soft-x-ray Source
(1995) In Review of Scientific Instruments 66(10). p.4916-4920- Abstract
- A tabletop high-brightness line-emitting laser-plasma soft xray source utilizing single microscopic droplets as target is shown to produce several orders of magnitude less debris than conventional-target sources. Quantitative measurements of debris deposition rates and x-ray flux, at different directions around the droplet plasma are presented. With ethanol droplets and a. 10 Hz. 70 mJ/pulse laser, typically similar to 1 x 10(12) photons/(sr . pulse . line) are emitted from the C V and C VI lines in the water window. The debris deposition is further reduced with a small, localized gas jet shield. which is transparent to the x-rays. The deposition rate through the gas shield has been determined to be similar to 0.2 pg/(sr . pulse). Thus,... (More)
- A tabletop high-brightness line-emitting laser-plasma soft xray source utilizing single microscopic droplets as target is shown to produce several orders of magnitude less debris than conventional-target sources. Quantitative measurements of debris deposition rates and x-ray flux, at different directions around the droplet plasma are presented. With ethanol droplets and a. 10 Hz. 70 mJ/pulse laser, typically similar to 1 x 10(12) photons/(sr . pulse . line) are emitted from the C V and C VI lines in the water window. The debris deposition is further reduced with a small, localized gas jet shield. which is transparent to the x-rays. The deposition rate through the gas shield has been determined to be similar to 0.2 pg/(sr . pulse). Thus, this droplet-target laser-plasma x-ray source is four orders-of-magnitude cleaner than a low-debris plastic tape target laser plasma of similar brightness, making it useful for x-ray microscopy and lithography. (C) 1995 American Institute of Physics. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/2259230
- author
- Rymell, L and Hertz, H. M
- publishing date
- 1995
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Review of Scientific Instruments
- volume
- 66
- issue
- 10
- pages
- 4916 - 4920
- publisher
- American Institute of Physics (AIP)
- external identifiers
-
- scopus:0029390160
- ISSN
- 1089-7623
- DOI
- 10.1063/1.1146174
- language
- English
- LU publication?
- no
- id
- 27e68b6e-de23-48e6-92e8-a9a657dd85ca (old id 2259230)
- date added to LUP
- 2016-04-04 09:26:52
- date last changed
- 2021-01-03 10:07:45
@article{27e68b6e-de23-48e6-92e8-a9a657dd85ca,
abstract = {{A tabletop high-brightness line-emitting laser-plasma soft xray source utilizing single microscopic droplets as target is shown to produce several orders of magnitude less debris than conventional-target sources. Quantitative measurements of debris deposition rates and x-ray flux, at different directions around the droplet plasma are presented. With ethanol droplets and a. 10 Hz. 70 mJ/pulse laser, typically similar to 1 x 10(12) photons/(sr . pulse . line) are emitted from the C V and C VI lines in the water window. The debris deposition is further reduced with a small, localized gas jet shield. which is transparent to the x-rays. The deposition rate through the gas shield has been determined to be similar to 0.2 pg/(sr . pulse). Thus, this droplet-target laser-plasma x-ray source is four orders-of-magnitude cleaner than a low-debris plastic tape target laser plasma of similar brightness, making it useful for x-ray microscopy and lithography. (C) 1995 American Institute of Physics.}},
author = {{Rymell, L and Hertz, H. M}},
issn = {{1089-7623}},
language = {{eng}},
number = {{10}},
pages = {{4916--4920}},
publisher = {{American Institute of Physics (AIP)}},
series = {{Review of Scientific Instruments}},
title = {{Debris Elimination In A Droplet-target Laser-plasma Soft-x-ray Source}},
url = {{https://lup.lub.lu.se/search/files/5327049/2297546.pdf}},
doi = {{10.1063/1.1146174}},
volume = {{66}},
year = {{1995}},
}