Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes
(2012) In IEEE Journal of Selected Topics in Quantum Electronics 18(1). p.434-442- Abstract
- The demonstration of table-top high average power extreme-ultraviolet (EUV) lasers combined with the engineering of specialized optics has enabled the demonstration of full-field microscopes that have achieved tens of nanometer spatial resolution. This paper describes the geometry of the EUV microscopes tailored to specific imaging applications. The microscope illumination characteristics are assessed and an analysis on the microscope's spatial resolution is presented. Examples of the capabilities of these table-top EUV aerial microscopes for imaging nanostructures and surfaces are presented.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/2416058
- author
- Brizuela, Fernando LU ; Howlett, Isela D. ; Carbajo, Sergio ; Peterson, Diana ; Sakdinawat, A. ; Liu, Yanwei ; Attwood, David T. ; Marconi, Mario C. ; Rocca, Jorge J. and Menoni, Carmen S.
- organization
- publishing date
- 2012
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Extreme ultraviolet (EUV) lasers, imaging, microscopy, nanotechnology
- in
- IEEE Journal of Selected Topics in Quantum Electronics
- volume
- 18
- issue
- 1
- pages
- 434 - 442
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- external identifiers
-
- wos:000299933700044
- scopus:84856963623
- ISSN
- 1077-260X
- DOI
- 10.1109/JSTQE.2011.2158393
- language
- English
- LU publication?
- yes
- id
- ca9bfedc-ed6d-475a-923b-0359f3fb8268 (old id 2416058)
- date added to LUP
- 2016-04-01 14:02:33
- date last changed
- 2022-02-19 08:52:34
@article{ca9bfedc-ed6d-475a-923b-0359f3fb8268, abstract = {{The demonstration of table-top high average power extreme-ultraviolet (EUV) lasers combined with the engineering of specialized optics has enabled the demonstration of full-field microscopes that have achieved tens of nanometer spatial resolution. This paper describes the geometry of the EUV microscopes tailored to specific imaging applications. The microscope illumination characteristics are assessed and an analysis on the microscope's spatial resolution is presented. Examples of the capabilities of these table-top EUV aerial microscopes for imaging nanostructures and surfaces are presented.}}, author = {{Brizuela, Fernando and Howlett, Isela D. and Carbajo, Sergio and Peterson, Diana and Sakdinawat, A. and Liu, Yanwei and Attwood, David T. and Marconi, Mario C. and Rocca, Jorge J. and Menoni, Carmen S.}}, issn = {{1077-260X}}, keywords = {{Extreme ultraviolet (EUV) lasers; imaging; microscopy; nanotechnology}}, language = {{eng}}, number = {{1}}, pages = {{434--442}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, series = {{IEEE Journal of Selected Topics in Quantum Electronics}}, title = {{Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes}}, url = {{http://dx.doi.org/10.1109/JSTQE.2011.2158393}}, doi = {{10.1109/JSTQE.2011.2158393}}, volume = {{18}}, year = {{2012}}, }