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Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes

Brizuela, Fernando LU ; Howlett, Isela D.; Carbajo, Sergio; Peterson, Diana; Sakdinawat, A.; Liu, Yanwei; Attwood, David T.; Marconi, Mario C.; Rocca, Jorge J. and Menoni, Carmen S. (2012) In IEEE Journal of Selected Topics in Quantum Electronics 18(1). p.434-442
Abstract
The demonstration of table-top high average power extreme-ultraviolet (EUV) lasers combined with the engineering of specialized optics has enabled the demonstration of full-field microscopes that have achieved tens of nanometer spatial resolution. This paper describes the geometry of the EUV microscopes tailored to specific imaging applications. The microscope illumination characteristics are assessed and an analysis on the microscope's spatial resolution is presented. Examples of the capabilities of these table-top EUV aerial microscopes for imaging nanostructures and surfaces are presented.
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Extreme ultraviolet (EUV) lasers, imaging, microscopy, nanotechnology
in
IEEE Journal of Selected Topics in Quantum Electronics
volume
18
issue
1
pages
434 - 442
publisher
IEEE--Institute of Electrical and Electronics Engineers Inc.
external identifiers
  • wos:000299933700044
  • scopus:84856963623
ISSN
1077-260X
DOI
10.1109/JSTQE.2011.2158393
language
English
LU publication?
yes
id
ca9bfedc-ed6d-475a-923b-0359f3fb8268 (old id 2416058)
date added to LUP
2012-03-28 10:31:26
date last changed
2017-08-13 04:01:11
@article{ca9bfedc-ed6d-475a-923b-0359f3fb8268,
  abstract     = {The demonstration of table-top high average power extreme-ultraviolet (EUV) lasers combined with the engineering of specialized optics has enabled the demonstration of full-field microscopes that have achieved tens of nanometer spatial resolution. This paper describes the geometry of the EUV microscopes tailored to specific imaging applications. The microscope illumination characteristics are assessed and an analysis on the microscope's spatial resolution is presented. Examples of the capabilities of these table-top EUV aerial microscopes for imaging nanostructures and surfaces are presented.},
  author       = {Brizuela, Fernando and Howlett, Isela D. and Carbajo, Sergio and Peterson, Diana and Sakdinawat, A. and Liu, Yanwei and Attwood, David T. and Marconi, Mario C. and Rocca, Jorge J. and Menoni, Carmen S.},
  issn         = {1077-260X},
  keyword      = {Extreme ultraviolet (EUV) lasers,imaging,microscopy,nanotechnology},
  language     = {eng},
  number       = {1},
  pages        = {434--442},
  publisher    = {IEEE--Institute of Electrical and Electronics Engineers Inc.},
  series       = {IEEE Journal of Selected Topics in Quantum Electronics},
  title        = {Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes},
  url          = {http://dx.doi.org/10.1109/JSTQE.2011.2158393},
  volume       = {18},
  year         = {2012},
}