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A micro-spectroscopy study on the influence of chemical residues from nanofabrication on the nitridation chemistry of Al nanopatterns

Qi, B.; Olafsson, S.; Zakharov, Alexei LU ; Agnarsson, B.; Gislason, H. P. and Gothelid, M. (2012) In Applied Surface Science 258(10). p.4497-4506
Abstract
We applied spatially resolved photoelectron spectroscopy implemented with an X-ray photoemission electron microscopy (XPEEM) using soft X-ray synchrotron radiation to identify the compositional and morphological inhomogeneities of a SiO2/Si substrate surface nanopatterned with Al before and after nitridation. The nanofabrication was conducted by a polymethylmethacrylate (PMMA)-based e-beam lithography and a fluorine-based reactive ion etching (RIE), followed by Al metalization and acetone lift-off. Three types of chemical residues were identified before nitridation: (1) fluorocarbons produced and accumulated mainly during RIE process on the sidewalls of the nanopatterns; (2) a thick Al-bearing PMMA layer and/or (3) a thin PMMA residue... (More)
We applied spatially resolved photoelectron spectroscopy implemented with an X-ray photoemission electron microscopy (XPEEM) using soft X-ray synchrotron radiation to identify the compositional and morphological inhomogeneities of a SiO2/Si substrate surface nanopatterned with Al before and after nitridation. The nanofabrication was conducted by a polymethylmethacrylate (PMMA)-based e-beam lithography and a fluorine-based reactive ion etching (RIE), followed by Al metalization and acetone lift-off. Three types of chemical residues were identified before nitridation: (1) fluorocarbons produced and accumulated mainly during RIE process on the sidewalls of the nanopatterns; (2) a thick Al-bearing PMMA layer and/or (3) a thin PMMA residue layer owing to unsuccessful or partial lift-off of the e-beam unexposed PMMA between the nanopatterns. The fluorocarbons actively influenced the surface chemical composition of the nanopatterns by forming Al-F compounds. After nitridation, in the PMMA residue-free area, the Al-F compounds on the sidewalls were decomposed and transformed to AIN. The PMMA residues between the nanopatterns had no obvious influence on the surface chemical composition and nitridation properties of the Al nanopatterns. They were only partially decomposed by the nitridation. The regional surface morphology of the nanopatterns revealed by the secondary electron XPEEM was consistent with the scanning electron microscopy results. (C) 2012 Elsevier B.V. All rights reserved. (Less)
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Nanopatterns, Nitridation, e-Beam lithography, Micro-spectroscopy, X-ray photoemission electron microscopy
in
Applied Surface Science
volume
258
issue
10
pages
4497 - 4506
publisher
Elsevier
external identifiers
  • wos:000300991400045
  • scopus:84857918940
ISSN
1873-5584
DOI
10.1016/j.apsusc.2012.01.015
language
English
LU publication?
yes
id
3dfb874e-2345-4e65-9780-83c5d8d1d2e5 (old id 2517217)
date added to LUP
2012-05-09 10:52:06
date last changed
2017-01-01 03:52:18
@article{3dfb874e-2345-4e65-9780-83c5d8d1d2e5,
  abstract     = {We applied spatially resolved photoelectron spectroscopy implemented with an X-ray photoemission electron microscopy (XPEEM) using soft X-ray synchrotron radiation to identify the compositional and morphological inhomogeneities of a SiO2/Si substrate surface nanopatterned with Al before and after nitridation. The nanofabrication was conducted by a polymethylmethacrylate (PMMA)-based e-beam lithography and a fluorine-based reactive ion etching (RIE), followed by Al metalization and acetone lift-off. Three types of chemical residues were identified before nitridation: (1) fluorocarbons produced and accumulated mainly during RIE process on the sidewalls of the nanopatterns; (2) a thick Al-bearing PMMA layer and/or (3) a thin PMMA residue layer owing to unsuccessful or partial lift-off of the e-beam unexposed PMMA between the nanopatterns. The fluorocarbons actively influenced the surface chemical composition of the nanopatterns by forming Al-F compounds. After nitridation, in the PMMA residue-free area, the Al-F compounds on the sidewalls were decomposed and transformed to AIN. The PMMA residues between the nanopatterns had no obvious influence on the surface chemical composition and nitridation properties of the Al nanopatterns. They were only partially decomposed by the nitridation. The regional surface morphology of the nanopatterns revealed by the secondary electron XPEEM was consistent with the scanning electron microscopy results. (C) 2012 Elsevier B.V. All rights reserved.},
  author       = {Qi, B. and Olafsson, S. and Zakharov, Alexei and Agnarsson, B. and Gislason, H. P. and Gothelid, M.},
  issn         = {1873-5584},
  keyword      = {Nanopatterns,Nitridation,e-Beam lithography,Micro-spectroscopy,X-ray photoemission electron microscopy},
  language     = {eng},
  number       = {10},
  pages        = {4497--4506},
  publisher    = {Elsevier},
  series       = {Applied Surface Science},
  title        = {A micro-spectroscopy study on the influence of chemical residues from nanofabrication on the nitridation chemistry of Al nanopatterns},
  url          = {http://dx.doi.org/10.1016/j.apsusc.2012.01.015},
  volume       = {258},
  year         = {2012},
}