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Cantilever-like micromechanical sensors

Boisen, Anja; Dohn, Søren; Keller, Stephan Sylvest; Schmid, Silvan and Tenje, Maria LU (2011) In Reports on Progress in Physics 74(3).
Abstract
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon- and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food... (More)
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon- and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection. (Less)
Please use this url to cite or link to this publication:
author
publishing date
type
Contribution to journal
publication status
published
subject
in
Reports on Progress in Physics
volume
74
issue
3
publisher
IOP Publishing
external identifiers
  • scopus:79952745063
ISSN
0034-4885
DOI
10.1088/0034-4885/74/3/036101
language
English
LU publication?
no
id
898672d3-9662-429d-83a9-042675904abf (old id 3129954)
date added to LUP
2012-10-16 14:30:31
date last changed
2017-10-29 03:46:57
@article{898672d3-9662-429d-83a9-042675904abf,
  abstract     = {The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon- and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.},
  author       = {Boisen, Anja and Dohn, Søren and Keller, Stephan Sylvest and Schmid, Silvan and Tenje, Maria},
  issn         = {0034-4885},
  language     = {eng},
  number       = {3},
  publisher    = {IOP Publishing},
  series       = {Reports on Progress in Physics},
  title        = {Cantilever-like micromechanical sensors},
  url          = {http://dx.doi.org/10.1088/0034-4885/74/3/036101},
  volume       = {74},
  year         = {2011},
}