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Drift study of SU8 cantilevers in liquid and gaseous environments

Tenje, Maria LU ; Keller, Stephan; Dohn, Søren; Boisen, Zachary J. and Boisen, Anja (2010) In Ultramicroscopy 110(6). p.596-598
Abstract
We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly... (More)
We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum. (Less)
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author
publishing date
type
Contribution to journal
publication status
published
subject
in
Ultramicroscopy
volume
110
issue
6
pages
596 - 598
publisher
Elsevier
external identifiers
  • pmid:20202757
  • scopus:77953539914
ISSN
0304-3991
DOI
10.1016/j.ultramic.2010.02.017
language
English
LU publication?
no
id
3bc5bd32-af16-4b6f-9f89-f42e583b13a7 (old id 3130317)
date added to LUP
2012-10-17 14:22:24
date last changed
2018-05-29 09:41:22
@article{3bc5bd32-af16-4b6f-9f89-f42e583b13a7,
  abstract     = {We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.},
  author       = {Tenje, Maria and Keller, Stephan and Dohn, Søren and Boisen, Zachary J. and Boisen, Anja},
  issn         = {0304-3991},
  language     = {eng},
  number       = {6},
  pages        = {596--598},
  publisher    = {Elsevier},
  series       = {Ultramicroscopy},
  title        = {Drift study of SU8 cantilevers in liquid and gaseous environments},
  url          = {http://dx.doi.org/10.1016/j.ultramic.2010.02.017},
  volume       = {110},
  year         = {2010},
}