Integrated optical readout for miniaturization of cantilever-based sensor system
(2008) In Applied Physics Letters 91(10).- Abstract
- The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3130401
- author
- Nordström, Maria LU ; Zauner, Dan A. ; Calleja, Montserrat ; Hübner, Jörg and Boisen, Anja
- publishing date
- 2008
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Applied Physics Letters
- volume
- 91
- issue
- 10
- publisher
- American Institute of Physics (AIP)
- external identifiers
-
- scopus:34548474502
- ISSN
- 0003-6951
- DOI
- 10.1063/1.2779851
- language
- English
- LU publication?
- no
- additional info
- Selected for September 17, 2007 issue of Virtual Journal of Nanoscale Science & Technology (American Institute of Physics and American Physical Society)
- id
- 6077e733-36bc-483e-8a4c-59e50aa9f16d (old id 3130401)
- date added to LUP
- 2016-04-01 12:01:52
- date last changed
- 2022-04-28 23:34:11
@article{6077e733-36bc-483e-8a4c-59e50aa9f16d, abstract = {{The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.}}, author = {{Nordström, Maria and Zauner, Dan A. and Calleja, Montserrat and Hübner, Jörg and Boisen, Anja}}, issn = {{0003-6951}}, language = {{eng}}, number = {{10}}, publisher = {{American Institute of Physics (AIP)}}, series = {{Applied Physics Letters}}, title = {{Integrated optical readout for miniaturization of cantilever-based sensor system}}, url = {{http://dx.doi.org/10.1063/1.2779851}}, doi = {{10.1063/1.2779851}}, volume = {{91}}, year = {{2008}}, }