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Integrated optical readout for miniaturization of cantilever-based sensor system

Tenje, Maria LU ; Zauner, Dan A.; Calleja, Montserrat; Hübner, Jörg and Boisen, Anja (2008) In Applied Physics Letters 91(10).
Abstract
The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.
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author
publishing date
type
Contribution to journal
publication status
published
subject
in
Applied Physics Letters
volume
91
issue
10
publisher
American Institute of Physics
external identifiers
  • scopus:34548474502
ISSN
0003-6951
DOI
10.1063/1.2779851
language
English
LU publication?
no
id
6077e733-36bc-483e-8a4c-59e50aa9f16d (old id 3130401)
date added to LUP
2012-10-17 15:04:16
date last changed
2017-09-17 04:56:28
@article{6077e733-36bc-483e-8a4c-59e50aa9f16d,
  abstract     = {The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.},
  author       = {Tenje, Maria and Zauner, Dan A. and Calleja, Montserrat and Hübner, Jörg and Boisen, Anja},
  issn         = {0003-6951},
  language     = {eng},
  number       = {10},
  publisher    = {American Institute of Physics},
  series       = {Applied Physics Letters},
  title        = {Integrated optical readout for miniaturization of cantilever-based sensor system},
  url          = {http://dx.doi.org/10.1063/1.2779851},
  volume       = {91},
  year         = {2008},
}