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EXAFS measurements of metal-decorated nanocavities in Si

Azevedo, GD; Ridgway, MC; Betlehem, J; Yu, KM; Glover, Chris LU and Foran, GJ (2003) 3rd International Conference on Synchrotron Radiation in Materials Science In Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 199. p.179-184
Abstract
This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
voids, gettering, silicon, EXAFS, cavities
in
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
volume
199
pages
179 - 184
publisher
Elsevier
conference name
3rd International Conference on Synchrotron Radiation in Materials Science
external identifiers
  • wos:000180925400036
  • scopus:0037244293
ISSN
0168-583X
DOI
language
English
LU publication?
yes
id
1a998dd4-1569-4558-8a6a-7b6c954b0b93 (old id 318505)
date added to LUP
2007-08-22 14:30:18
date last changed
2018-05-29 10:24:21
@inproceedings{1a998dd4-1569-4558-8a6a-7b6c954b0b93,
  abstract     = {This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.},
  author       = {Azevedo, GD and Ridgway, MC and Betlehem, J and Yu, KM and Glover, Chris and Foran, GJ},
  booktitle    = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
  issn         = {0168-583X},
  keyword      = {voids,gettering,silicon,EXAFS,cavities},
  language     = {eng},
  pages        = {179--184},
  publisher    = {Elsevier},
  title        = {EXAFS measurements of metal-decorated nanocavities in Si},
  url          = {http://dx.doi.org/},
  volume       = {199},
  year         = {2003},
}