Fabrication of micro-mechanical sensors with the polymer SU-8
(2009) Eurosensors XXIII- Abstract
- In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3233217
- author
- Keller, S. ; Tenje, Maria LU ; Noeth, N. ; Dohn, S. ; Blagoi, G. ; Haefliger, D. and Boisen, A.
- publishing date
- 2009
- type
- Contribution to conference
- publication status
- published
- subject
- conference name
- Eurosensors XXIII
- conference location
- Lausanne, Switzerland
- conference dates
- 2009-09-06 - 2009-09-09
- language
- English
- LU publication?
- no
- id
- 6793f9cc-045d-4dd5-b3aa-e98241846a31 (old id 3233217)
- date added to LUP
- 2016-04-04 13:28:07
- date last changed
- 2018-11-21 21:14:11
@misc{6793f9cc-045d-4dd5-b3aa-e98241846a31, abstract = {{In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.}}, author = {{Keller, S. and Tenje, Maria and Noeth, N. and Dohn, S. and Blagoi, G. and Haefliger, D. and Boisen, A.}}, language = {{eng}}, title = {{Fabrication of micro-mechanical sensors with the polymer SU-8}}, year = {{2009}}, }