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Characterisation of SU-8 as a platform for cantilever sensors

Tenje, Maria LU ; Calleja, M. and Boisen, A. (2006) 1st International workshop on nanomechanical sensors p.76-77
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author
publishing date
type
Contribution to conference
publication status
published
subject
pages
76 - 77
conference name
1st International workshop on nanomechanical sensors
language
English
LU publication?
no
id
9546c616-1d8c-4ec4-a823-e72c277c786c (old id 3288062)
date added to LUP
2012-12-19 12:15:51
date last changed
2016-06-29 09:09:56
@misc{9546c616-1d8c-4ec4-a823-e72c277c786c,
  author       = {Tenje, Maria and Calleja, M. and Boisen, A.},
  language     = {eng},
  pages        = {76--77},
  title        = {Characterisation of SU-8 as a platform for cantilever sensors},
  year         = {2006},
}