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Investigation of the bond strength between the photo-sensitive polymer SU-8 and Au

Tenje, Maria LU ; Johansson, A.; Sánchez-Noguerón, E.; Clausen, B.; Calleja, M. and Boisen, A. (2004) 30th International conference on Micro and Nano Engineering (MNE 2004) p.214-215
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author
publishing date
type
Contribution to conference
publication status
published
subject
pages
214 - 215
conference name
30th International conference on Micro and Nano Engineering (MNE 2004)
language
English
LU publication?
no
id
ce4d9c8c-bbd7-4e5c-8a9a-743c4884dd08 (old id 3351335)
date added to LUP
2013-01-09 14:36:21
date last changed
2016-06-29 09:01:08
@misc{ce4d9c8c-bbd7-4e5c-8a9a-743c4884dd08,
  author       = {Tenje, Maria and Johansson, A. and Sánchez-Noguerón, E. and Clausen, B. and Calleja, M. and Boisen, A.},
  language     = {eng},
  pages        = {214--215},
  title        = {Investigation of the bond strength between the photo-sensitive polymer SU-8 and Au},
  year         = {2004},
}