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Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam

Ghatnekar-Nilsson, Sara LU ; Graham, J. ; Hull, R. and Montelius, Lars LU (2006) In Nanotechnology 17(20). p.5233-5237
Abstract
We demonstrate arrays of cantilevers with different lengths, fabricated by focused ion beam milling. The arrays of oscillators generate a spectrum of different resonant frequencies, where each frequency correlates to the corresponding individual cantilever. The frequency response from all the cantilevers is collected from a single measurement under the same environment and conditions for the entire array. The mass response of the system generated the same Delta f/f(0) for the cantilevers, within 0.1% accuracy. We denote the method MFSAC: multi-frequency signal analysis from an array of cantilevers. The simultaneous detection of several frequencies in one spectrum has great benefits in mass sensor applications, offering the possibility for... (More)
We demonstrate arrays of cantilevers with different lengths, fabricated by focused ion beam milling. The arrays of oscillators generate a spectrum of different resonant frequencies, where each frequency correlates to the corresponding individual cantilever. The frequency response from all the cantilevers is collected from a single measurement under the same environment and conditions for the entire array. The mass response of the system generated the same Delta f/f(0) for the cantilevers, within 0.1% accuracy. We denote the method MFSAC: multi-frequency signal analysis from an array of cantilevers. The simultaneous detection of several frequencies in one spectrum has great benefits in mass sensor applications, offering the possibility for true label-free detection. (Less)
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author
; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Nanotechnology
volume
17
issue
20
pages
5233 - 5237
publisher
IOP Publishing
external identifiers
  • wos:000241856000031
  • scopus:33749523895
ISSN
0957-4484
DOI
10.1088/0957-4484/17/20/031
language
English
LU publication?
yes
id
9e8f3435-4c6d-4dee-8a35-9956d8644ba2 (old id 376886)
date added to LUP
2016-04-01 12:28:04
date last changed
2021-02-17 04:18:26
@article{9e8f3435-4c6d-4dee-8a35-9956d8644ba2,
  abstract     = {We demonstrate arrays of cantilevers with different lengths, fabricated by focused ion beam milling. The arrays of oscillators generate a spectrum of different resonant frequencies, where each frequency correlates to the corresponding individual cantilever. The frequency response from all the cantilevers is collected from a single measurement under the same environment and conditions for the entire array. The mass response of the system generated the same Delta f/f(0) for the cantilevers, within 0.1% accuracy. We denote the method MFSAC: multi-frequency signal analysis from an array of cantilevers. The simultaneous detection of several frequencies in one spectrum has great benefits in mass sensor applications, offering the possibility for true label-free detection.},
  author       = {Ghatnekar-Nilsson, Sara and Graham, J. and Hull, R. and Montelius, Lars},
  issn         = {0957-4484},
  language     = {eng},
  number       = {20},
  pages        = {5233--5237},
  publisher    = {IOP Publishing},
  series       = {Nanotechnology},
  title        = {Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam},
  url          = {http://dx.doi.org/10.1088/0957-4484/17/20/031},
  doi          = {10.1088/0957-4484/17/20/031},
  volume       = {17},
  year         = {2006},
}