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Fabrication and Characterisations of New Ultra-thin Silicon Detectors as Pre-Cell Hit Detectors for a Cell Irradiation Facility at LIBAF

Salim, Naseem LU (2013)
Abstract
For the development of single–ion irradiation system for living cells at the Lund Ion Beam Analysis

facility (LIBAF) newly developed pre-cell (PC) detectors have been investigated. Central to the thesis is the

fabrication and initial characterization of more than 100 ultra-thin silicon detectors having different

thicknesses down to 5 μm with active areas ranging from 0.71 to 0.172 mm2, to be used as PC detectors. The

fabrication and packaging processes of these devices were carried out on the double-polished silicon

substrate n-type wafer using Silicon Microfabrication Technology. The main design considerations of our

thin detectors were a very low leakage current below 12 nA and a low... (More)
For the development of single–ion irradiation system for living cells at the Lund Ion Beam Analysis

facility (LIBAF) newly developed pre-cell (PC) detectors have been investigated. Central to the thesis is the

fabrication and initial characterization of more than 100 ultra-thin silicon detectors having different

thicknesses down to 5 μm with active areas ranging from 0.71 to 0.172 mm2, to be used as PC detectors. The

fabrication and packaging processes of these devices were carried out on the double-polished silicon

substrate n-type wafer using Silicon Microfabrication Technology. The main design considerations of our

thin detectors were a very low leakage current below 12 nA and a low full depletion voltage at a reverse bias

less than 1.5 V. The performance of the thin detectors as particle trackers was investigated with 5.487 MeV

alpha particles, obtaining a good energy resolution (FWHM) and high efficiency. During the detector tests

as a pre-detection stage of 2.55 MeV protons in ΔE-E configuration, the results showed that best performing

detector 9.7 μm thick, had a detection efficiency of 96%. This efficiency is good enough to be utilized as

good single-proton identifier. In conclusion, the fabricated devices are well suited for living cell irradiation

experiments. (Less)
Please use this url to cite or link to this publication:
author
supervisor
organization
publishing date
type
Thesis
publication status
published
subject
keywords
SIHF, ΔE detector, single ions, Ultra-thin silicon detector and Microfabrication
categories
Higher Education
pages
35 pages
publisher
Lund University
external identifiers
  • other:LUTFD2 / (TFKF-3104)/ 1-43/2013
language
English
LU publication?
yes
additional info
The information about affiliations in this record was updated in December 2015. The record was previously connected to the following departments: Nuclear Physics (Faculty of Technology) (011013007)
id
3ba2532a-6ff1-45ac-ac5c-e605a6cc2a29 (old id 4780436)
date added to LUP
2016-04-04 10:37:03
date last changed
2025-04-04 14:29:05
@misc{3ba2532a-6ff1-45ac-ac5c-e605a6cc2a29,
  abstract     = {{For the development of single–ion irradiation system for living cells at the Lund Ion Beam Analysis<br/><br>
facility (LIBAF) newly developed pre-cell (PC) detectors have been investigated. Central to the thesis is the<br/><br>
fabrication and initial characterization of more than 100 ultra-thin silicon detectors having different<br/><br>
thicknesses down to 5 μm with active areas ranging from 0.71 to 0.172 mm2, to be used as PC detectors. The<br/><br>
fabrication and packaging processes of these devices were carried out on the double-polished silicon<br/><br>
substrate n-type wafer using Silicon Microfabrication Technology. The main design considerations of our<br/><br>
thin detectors were a very low leakage current below 12 nA and a low full depletion voltage at a reverse bias<br/><br>
less than 1.5 V. The performance of the thin detectors as particle trackers was investigated with 5.487 MeV<br/><br>
alpha particles, obtaining a good energy resolution (FWHM) and high efficiency. During the detector tests<br/><br>
as a pre-detection stage of 2.55 MeV protons in ΔE-E configuration, the results showed that best performing<br/><br>
detector 9.7 μm thick, had a detection efficiency of 96%. This efficiency is good enough to be utilized as<br/><br>
good single-proton identifier. In conclusion, the fabricated devices are well suited for living cell irradiation<br/><br>
experiments.}},
  author       = {{Salim, Naseem}},
  keywords     = {{SIHF; ΔE detector; single ions; Ultra-thin silicon detector and Microfabrication}},
  language     = {{eng}},
  note         = {{Licentiate Thesis}},
  publisher    = {{Lund University}},
  title        = {{Fabrication and Characterisations of New Ultra-thin Silicon Detectors as Pre-Cell Hit Detectors for a Cell Irradiation Facility at LIBAF}},
  year         = {{2013}},
}