Nanoimprint lithography for the fabrication of interdigitated cantilever arrays
(2006) In Nanotechnology 17(8). p.1906-1910- Abstract
- We report on the realization of a novel interdigitated cantilever array with electrostatic control of the shape of the interdigitated array. It consists of an array of SiO2/metal double-finger cantilevers in a grating configuration together with an electrical connection part. The complete grating structure is fabricated with nanoimprint lithography, UV lithography and reactive ion etching. The patterns of the cantilever arrays are defined by nanoimprint lithography. The electrical contact pads are defined and aligned with the imprinted grating pattern by UV lithography. The two steps of reactive ion etching are optimized to get vertical sidewalls of the SiO2 cantilevers and finally to release them from the Si substrate. By applying a bias,... (More)
- We report on the realization of a novel interdigitated cantilever array with electrostatic control of the shape of the interdigitated array. It consists of an array of SiO2/metal double-finger cantilevers in a grating configuration together with an electrical connection part. The complete grating structure is fabricated with nanoimprint lithography, UV lithography and reactive ion etching. The patterns of the cantilever arrays are defined by nanoimprint lithography. The electrical contact pads are defined and aligned with the imprinted grating pattern by UV lithography. The two steps of reactive ion etching are optimized to get vertical sidewalls of the SiO2 cantilevers and finally to release them from the Si substrate. By applying a bias, the shape of the cantilever array can be altered due to the electrostatic force. The dimensions of the cantilevers and the spacing between them are optimized to achieve the desired functional operating characteristics of the structures. Since the fabrication scheme is based on nanoimprint lithography, such electrostatically controlled periodic structures may be relatively easily and non-expensively realized in various configurations, allowing them to function as optical switching elements, electrical filters, mass sensors, etc. (Less)
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https://lup.lub.lu.se/record/408531
- author
- organization
- publishing date
- 2006
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Nanotechnology
- volume
- 17
- issue
- 8
- pages
- 1906 - 1910
- publisher
- IOP Publishing
- external identifiers
-
- wos:000237813000018
- scopus:33645291544
- ISSN
- 0957-4484
- DOI
- 10.1088/0957-4484/17/8/017
- language
- English
- LU publication?
- yes
- id
- 3c504f58-f5c0-4573-b1d3-298d76700aad (old id 408531)
- date added to LUP
- 2016-04-01 11:41:31
- date last changed
- 2022-01-26 08:50:27
@article{3c504f58-f5c0-4573-b1d3-298d76700aad,
abstract = {{We report on the realization of a novel interdigitated cantilever array with electrostatic control of the shape of the interdigitated array. It consists of an array of SiO2/metal double-finger cantilevers in a grating configuration together with an electrical connection part. The complete grating structure is fabricated with nanoimprint lithography, UV lithography and reactive ion etching. The patterns of the cantilever arrays are defined by nanoimprint lithography. The electrical contact pads are defined and aligned with the imprinted grating pattern by UV lithography. The two steps of reactive ion etching are optimized to get vertical sidewalls of the SiO2 cantilevers and finally to release them from the Si substrate. By applying a bias, the shape of the cantilever array can be altered due to the electrostatic force. The dimensions of the cantilevers and the spacing between them are optimized to achieve the desired functional operating characteristics of the structures. Since the fabrication scheme is based on nanoimprint lithography, such electrostatically controlled periodic structures may be relatively easily and non-expensively realized in various configurations, allowing them to function as optical switching elements, electrical filters, mass sensors, etc.}},
author = {{Luo, Gang and Maximov, Ivan and Adolph, David and Graczyk, Mariusz and Carlberg, Patrick and Ghatnekar-Nilsson, Sara and Hessman, Dan and Zhu, T and Liu, Z and Xu, Hongqi and Montelius, Lars}},
issn = {{0957-4484}},
language = {{eng}},
number = {{8}},
pages = {{1906--1910}},
publisher = {{IOP Publishing}},
series = {{Nanotechnology}},
title = {{Nanoimprint lithography for the fabrication of interdigitated cantilever arrays}},
url = {{http://dx.doi.org/10.1088/0957-4484/17/8/017}},
doi = {{10.1088/0957-4484/17/8/017}},
volume = {{17}},
year = {{2006}},
}